We report improvements in the detection limit and responsivity of biomimetic hair-flow sensors by electrostatic spring softening. Applying a dc-bias voltage to our capacitive flow sensors results in a reduced sensory threshold, improving the mechanical transfer and flow detection limit by more than 6 dB. We further show that the sensor's responsivity for airflows is also improved on application of high-frequency ac-bias voltages to the sensor's capacitive structures with little sensitivity to the bias frequency.

We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 µm diameter and 1.2 µm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.

A silicon six-axis force–torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive read-out is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N mm of maximum torque around each axis.

Abstract-This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0 ± 500 μl/h with an accuracy of 1% full scale error.