Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

“…The authors' group reported that the "hammerhead" design is effective for the layered SAW structure employing a 42-LT thin plate 36) where the SAW slowness curve is almost flat while the "metal dot" design for the temperature compensated (TC) SAW structure on 128°YX-LiNbO 3 where the SAW slowness curve is convex. [32][33][34][35] The SAW slowness curve is also convex for the present case.…”

Application of an overlay for spurious suppression of multi-layered surface acoustic wave resonators with double busbar configuration

“…[12][13][14][15][16] The authors proposed the double busbar configuration for suppression of lateral energy leakage and demonstrated further Q enhancement. [17][18][19] In many cases, the Q enhancement makes not only the main resonance but also the spurious ones prominent. Generally, transverse mode resonances are the most troublesome.…”

Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method

“…It has the advantages of high sensitivity, low cost, low power consumption, miniaturization and direct frequency signal output. With the increasing demand for miniaturized, low power consumption and highly integrated mobile devices, the Surface Acoustic Wave (SAW) filters are widely used [ 1 ].In recent years, there have been many commercial SAW filters on the market, e.g., (1) 42° YX Cut LiTaO 3 SAW [ 2 ]; (2) Incredible High-Performance SAW (I.H.P SAW) [ 3 , 4 , 5 , 6 , 7 ]; (3) 128° YX Cut LiNbO 3 Temperature Compensate SAW [ 8 ]. The I.H.P.…”

“…SAW introduces a functional layer and a high acoustic velocity layer under the piezoelectric crystal layer. The active layer is usually used for frequency compensation; the high-velocity layer is used to limit energy propagation and increase the speed of the acoustic surface waves [ 3 , 4 , 5 , 6 , 7 ]. Temperature Compensate SAW(TC-SAW) has a complementary temperature layer-SiO 2 , which can play a role in temperature compensation and improve the Q value of the SAW resonators.…”

“…Temperature Compensate SAW(TC-SAW) has a complementary temperature layer-SiO 2 , which can play a role in temperature compensation and improve the Q value of the SAW resonators. However, the I.H.P SAW and TC-SAW both have the problem of high sub-mode transverse wave response [ 3 , 4 , 5 , 6 , 7 , 8 ].…”