S₀-like SAW mode resonator on LiNbO₃/SiO₂/SiC structure

Abstract

This paper discusses basic properties of a SAW (Surface Acoustic Wave) mode like the zeroth-order symmetric (S0) Lamb mode in the LiNbO3/SiO2/SiC configuration in detail. At first, influence of the SiO2 insertion is discussed, and it is shown that the SiO2 insertion offers significant enhancement of the electromechanical coupling factor for the S0-like SAW mode without significant reduction of the phase velocity. Then, the discussion is extended to spurious resonance characteristics. It is shown that the dummy electrodes are not necessary in this case. Then, two kinds of the piston design are applied for the transverse suppression, and their effectiveness is discussed.