2015
DOI: 10.1109/jsyst.2013.2281124
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Distributed Intelligent MEMS: Progresses and Perspectives

Abstract: MEMS research has until recently focused mainly on the engineering process, resulting in interesting products and a growing market. To fully realize the promise of MEMS, the next step is to add embedded intelligence. With embedded intelligence, the scalability of manufacturing will enable distributed MEMS systems consisting of thousands or millions of units which can work together to achieve a common goal. However, before such systems can become a reallity, we must come to grips with the challenge of scalabili… Show more

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Cited by 37 publications
(22 citation statements)
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“…Wang et al presented a wireless wearable sensing device based on MEMS for next-generation sports training [19]. The future of the MEMS sensors is to incorporate embedded intelligence [11,20], where the millions of units in MEMS systems could work together to finish a common task. Furthermore, the scalability of the system could be enabled.…”
Section: Related Workmentioning
confidence: 99%
See 1 more Smart Citation
“…Wang et al presented a wireless wearable sensing device based on MEMS for next-generation sports training [19]. The future of the MEMS sensors is to incorporate embedded intelligence [11,20], where the millions of units in MEMS systems could work together to finish a common task. Furthermore, the scalability of the system could be enabled.…”
Section: Related Workmentioning
confidence: 99%
“…Therefore, it has been widely applied in sensors [9,10]. Recently, embedded intelligence has been added to sensors for more efficient collaboration [11].…”
Section: Introductionmentioning
confidence: 99%
“…The problem of self-reconfiguration is a challenge in robotics applications. Control in systems of microrobots involves the coordination and cooperation of large numbers of identical modules connected in a volatile manner over time [15], [16].…”
Section: Introductionmentioning
confidence: 99%
“…Microrobots systems have a wide range of applications such as odor localization, firefighting, medical service, surveillance, search, rescue, and security. To do these tasks the nodes have to perform the self-reconfiguration [3], [18].…”
Section: Introductionmentioning
confidence: 99%