2008
DOI: 10.1063/1.3025305
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Displacement detection of silicon nanowires by polarization-enhanced fiber-optic interferometry

Abstract: We describe the displacement detection of freestanding silicon [111] nanowires by fiber-optic interferometry. We observe approximately a 50-fold enhancement in the scattered intensity for nanowires 40–60nm in diameter for incident light polarized parallel to the nanowire axis, as compared to perpendicular polarization. This enhancement enables us to achieve a displacement sensitivity of 0.5pm∕Hz for 15μW of light incident on the nanowire. The nanowires exhibit ultralow mechanical dissipation in the range of (2… Show more

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Cited by 84 publications
(125 citation statements)
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“…In this article, we expose a novel ultrasensitive measurement technique going beyond scalar measurements and permitting to directly image vectorial 2D force fields. It is based on a singly clamped nanowire (NW) which can oscillate along two perpendicular transverse directions [18,[20][21][22][23][24]. Its vibrating extremity is immersed in the force field under investigation while its 2D-Brownian motion is optically detected and reconstructed in realtime.…”
mentioning
confidence: 99%
“…In this article, we expose a novel ultrasensitive measurement technique going beyond scalar measurements and permitting to directly image vectorial 2D force fields. It is based on a singly clamped nanowire (NW) which can oscillate along two perpendicular transverse directions [18,[20][21][22][23][24]. Its vibrating extremity is immersed in the force field under investigation while its 2D-Brownian motion is optically detected and reconstructed in realtime.…”
mentioning
confidence: 99%
“…Several other routes have been explored, including, for example, surface cleaning under ultra high-vacuum conditions 14 or the use of doubly clamped beams at high spring tension 15 . Exciting recent progress has further been made with bottom-up devices such as suspended carbon nanotube 16 , silicon nanowire 17 or trapped ion 18 oscillators. All of these approaches have their drawbacks, however.…”
mentioning
confidence: 99%
“…To fully understand and quantitatively demonstrate the position-dependent nature of the multimode resonance spectra, we now focus on measuring the peak amplitude of each of the five resonance modes, while scanning the laser spot throughout the device area (that is, the so-called scanning spectromicroscopy) 33,34 . The left panels in Fig.…”
Section: Resultsmentioning
confidence: 99%