Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

Tao, Yazhong; Boss, J. M.; Moores, B. A.; Degen, C. L.

doi:10.1038/ncomms4638

Cited by 310 publications

(311 citation statements)

References 52 publications

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“…[113] [115] ). [115] An alternative approach to fabricate thin diamond membranes without the need to start from already thin material has been introduced in Refs. [116,117] .…”

Section: Fabrication Of Nanophotonics Devices From Single Crystal Diamentioning

confidence: 99%

Diamond Nanophotonics

Aharonovich

Neu

2014

Advanced Optical Materials

296

233

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“…[113] [115] ). [115] An alternative approach to fabricate thin diamond membranes without the need to start from already thin material has been introduced in Refs. [116,117] .…”

Section: Fabrication Of Nanophotonics Devices From Single Crystal Diamentioning

confidence: 99%

Diamond Nanophotonics

Aharonovich

Neu

2014

Advanced Optical Materials

296

233

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“…Thus, such phononic reservoir engineering ideas could provide a valuable alternative for mechanical systems, where an efficient integration with optical or microwave photons is not available. In view of the recent progress in the fabrication of high-quality diamond structures and mechanical beams [40][41][42], and demonstrations of straininduced control of defects [43][44][45][46][47], the proposed scheme could realistically be implemented in such systems.…”

Section: Fig 1 (A) Sketch Of a Single Sivmentioning

confidence: 99%

Cooling phonons with phonons: Acoustic reservoir engineering with silicon-vacancy centers in diamond

et al. 2016

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We study a setup where a single negatively-charged silicon-vacancy center in diamond is magnetically coupled to a low-frequency mechanical bending mode and via strain to the high-frequency phonon continuum of a semi-clamped diamond beam. We show that under appropriate microwave driving conditions, this setup can be used to induce a laser cooling like effect for the low-frequency mechanical vibrations, where the high-frequency longitudinal compression modes of the beam serve as an intrinsic low-temperature reservoir. We evaluate the experimental conditions under which cooling close to the quantum ground state can be achieved and describe an extended scheme for the preparation of a stationary entangled state between two mechanical modes. By relying on intrinsic properties of the mechanical beam only, this approach offers an interesting alternative for quantum manipulation schemes of mechanical systems, where otherwise efficient optomechanical interactions are not available.

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“…However, reducing the nano-resonators, thickness introduces a decreased Q m due to increased surface friction by surface defects 24,25 . Q m can be restored by reducing the temperature 27 (the surface friction being less at cryogenic temperatures), which reduces practicability. Another option is to use materials that naturally lend themselves to high Q m and high f c (noting that Q m ; f c p ffiffiffiffi ffi k c p ; k c pE), due to higher k c , because of high stiffness (i.e., a high Young Modulus E, E = 1220 GPa and ρ = 3530 kg m − 3 for example single crystal diamond) 24 .…”

Section: Nanomechanical Componentsmentioning

confidence: 99%

Advances in diamond nanofabrication for ultrasensitive devices

Castelletto

Rosa

Blackledge³

et al. 2017

Microsyst Nanoeng

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This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies. INTRODUCTIONDiamond is an ideal platform for nano-and microfabrication leading to a range of robust sensors. This is due to the outstanding mechanical and wide spectral optical transparency of diamond, combined with biocompatibility and lack of toxicity in both bulk and nanostructures. Moreover, diamond can be fabricated with high purity and control using chemical vapor deposition. However, due to its hardness and cost, some of its applications in nanomechanics, optomechanics and nanophotonics reside mainly in its polycrystalline or nanocrystalline forms, which do not always retain the nuance of the outstanding properties of monocrystalline diamond.A recent review 1 describes diamond optical and mechanical properties compared to other materials currently used for optomechanical components (Si, Si 3 N 4 , SiC, and α-Al 2 O 3 ), showing that, in principle, there are more favorable properties of diamond for nanomechanical and optomechanical realizations. Therefore, a considerable effort has been taking place over the last five years to exploit these properties in a wide spectrum of diamond nanosystems. To date, single crystal diamond utilization for nanomechanical components 2 , (for example, nano electromechanical systems (NEMS) and micro electro-mechanical systems (MEMS)), as well for nanophotonics 3,4 compared to above mentioned materials, has been limited due to its growth requirements. In fact, a single crystal diamond cannot be grown on any other substrate than itself. This prevents wafer-scale processing and it represents a challenge in the application of conventional diamond nanofabrication methods. On the other hand, polycrystalline diamond films, which can be grown in high quality from 4 to 6 inches' wafers 5 , permit to fabricate optomechanical components with quality factors and oscillation frequencies rivaling single crystal diamond 6 .

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Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

Cited by 310 publications

References 52 publications

Diamond Nanophotonics

Diamond Nanophotonics

Cooling phonons with phonons: Acoustic reservoir engineering with silicon-vacancy centers in diamond

Advances in diamond nanofabrication for ultrasensitive devices

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