Abstract:The aim of this work is a discussion on the figures of merit of identified traps located in the depletion zone (Si film) of advanced MOSFET devices. Two methodologies to estimate the volume trap densities are investigated, one using the relationship between the surface trap density and volume trap density and a second one based on the temperature evolution at fixed frequency of the generation-recombination plateau level associated to the same trap. By comparing the volume trap densities estimated using these t… Show more
“…Unphysical values of the estimated Bexp were already reported in particular for multi-gate devices (e.g. FinFETs) [8] suggesting that the utilization of NT as a figure of merit may be not accurate.…”
“…Unphysical values of the estimated Bexp were already reported in particular for multi-gate devices (e.g. FinFETs) [8] suggesting that the utilization of NT as a figure of merit may be not accurate.…”
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