Discrete Sliding Mode Control of Piezo Actuator in Nano-Scale Range

Khan, Shahzad; Elitaş, Meltem; Kunt, Emrah Deniz; Şabanoviç, Asif

doi:10.1109/icit.2006.372418

Cited by 15 publications

(9 citation statements)

References 8 publications

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“…A control scheme with such a disturbance observer is shown in Figure 11. This scheme has been shown to be effective in both step [140] and high frequency tracking (200 Hz sinusoidal) [141] operations. …”

Section: Disturbance Observer Based Schemesmentioning

confidence: 99%

A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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Piezoelectric actuators (PEAs) have been widely used in micro-and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.

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Section: Disturbance Observer Based Schemesmentioning

confidence: 99%

A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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“…In such systems the first step in design is to select sliding mode manifolds on which the motion of the system will be constrained. In bilateral control system, consisting of functionally related master and slave subsystems as defined by (21) and (22) the selection of the force tracking manifold should be defined taking into consideration the impedance of the human operator as depicted in (23). Force tracking manifold is selected as a difference between force perceived by operator defined by spring C h and damper D h coefficients and the force appearing in the interaction with environment defined by spring C e and damper D e coefficients.…”

Section: Bilateral Controlmentioning

confidence: 99%

“…The selection of the controller for (32) and (33) like in (12) will satisfy the stability conditions and ensure that the sliding mode is enforced in intersection (27) thus ensuring the motion of the system in intersection of manifolds (23) and (24). That way the condition for the bilateral systems operation (21) and (22) are satisfied.…”

Section: Bilateral Controlmentioning

confidence: 99%

“…Nano scale positioning [23] of the micro-cantilever has been provided using three axes piezo stages (P-611 by Physik Instrumente) which are driven by a power amplifier (E-664) in closed loop external control mode. Potentiometers (strain gauge sensors) integrated in the amplifier, are utilized for position measurement of the closed loop stages which possess a travel range of 100µm per axis with one nanometer theoretical resolution.…”

Section: Tele-micromanipulationmentioning

confidence: 99%

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Task Based Bilateral Control for Microsystems Application

et al. 2011

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Original scientific paperDesign of a motion control system, convenient for a wide range of applications in industry, space, biology, medicine, particularly including more than one physics environment is very important. Well known control architectures like trajectory tracking, compliance control, interaction force control are scientific milestones which has common control task: to maintain desired system configuration. In this concept, motion control system can be an unconstrained motion-performed interaction with neither environment nor any other system, or constrained motionsystem in contact with environment and/or other systems. This paper provides the function based design approach to formulate control of constrained system particularly bilateral systems in micromanipulation applications. The control objective aimed to maintain desired functional relations between human and environment defining convenient tasks and their proper relations on master and slave motion systems. Preliminary results concerning position tracking, force control and transparency between master and slave systems are clearly demonstrated. Key words: Bilateral control, Motion control, Micromanipulation, TeleoperationBilateralno upravljanje zasnovano na zadacima za primjene u mikrosustavima. Sinteza slijednog sustava prikladnog za široki raspon primjena u industriji, svemiru, biologiji, medicini te posebno za primjene koje obuhvaćaju više raličitih fizikalnih okruženja, vrlo je važna. Dobro poznate strukture upravljanja poput slijeenja trajektorije, usklaenog upravljanja i upravljanja interakcijskom silom predstavljaju znanstvene prekretnice koje imaju zajednički upravljački cilj: održavanje željene konfiguracije sustava. U ovom konceptu, slijedni sustav može biti sustav bez ograničenja i bez interakcije s okolinom ili ostalim sustavima, odnosno može biti sustav s ograničen-jima koji je spregnut s okolinom i/ili drugim sustavima. Ovajčlanak opisuje funkcijski zasnovanu sintezu sustava upravljanja za sustav s ograničenjima, a posebno za bilateralne sustave u mikromanipulacijskim primjenama. Cilj upravljanja je održavanje željenih funkcionalnih relacija izmežučovjeka i okoline definirajući prikladne zadaće i njihove odgovarajuće relacije za glavni i podreeni slijedni sustav. Preliminarni rezultati vezani uz upravljanje pozicijom, upravljanje silom te veza izmeu glavnog i podreenog sustava su jasno prezentirani.

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“…• Actuators with high resolution (in nanometer range), high bandwidth (up to several kilo hertz), large force output (up to few newtons) and relatively large travel range (up to a few millimeters) [8]. • Robust and transparent bilateral controllers for human intervention so that high fidelity position/force interaction between the operator and the remote micro environment can be achieved [9,10].…”

Section: Introductionmentioning

confidence: 99%

Force feedback pushing scheme for micromanipulation applications

Khan

Şabanoviç

2009

J. Micro-Nano Mech.

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Pushing micro-objects using point contact provides more flexibility and less complexity compared to pick and place operation. Due to the fact that in micro-world surface forces are much more dominant than inertial forces and these forces are distributed unevenly, pushing through the center of mass of the micro-object may not yield a pure translational motion. In order to translate a micro-object, the line of pushing should pass through the center of friction. In this paper, a semi-autonomous scheme based on hybrid vision/force feedback procedure is proposed to push micro-objects with human assistance using a custom built tele-micromanipulation setup to achieve translational motion. In the semi-autonomous pushing process, velocity controlled pushing with force feedback is realized along x-axis by the human operator while y-axis orientation is undertaken automatically using visual feedback. In this way the desired line Electronic supplementary material The online version of this article (of pushing for the micro-object is controlled to pass through the varying center of friction. Experimental results are shown to prove nano-Newton range force sensing, scaled bilateral teleoperation with force feedback and pushing operation.

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Discrete Sliding Mode Control of Piezo Actuator in Nano-Scale Range

Cited by 15 publications

References 8 publications

A Survey of Modeling and Control of Piezoelectric Actuators

A Survey of Modeling and Control of Piezoelectric Actuators

Task Based Bilateral Control for Microsystems Application

Force feedback pushing scheme for micromanipulation applications

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