Direct Writing of Copper Film Patterns by Laser‐Induced Decomposition of Copper Acetate

Abstract

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Laser-induced prenucleation of alumina for electroless plating

“…The use of a laser for direct deposition of metals on conducting and non-conducting surfaces has been the subject of much attention in recent days [1,2]. Attempts have been made to deposit metal from gas phase [3][4][5], liquid phase [6][7][8][9][10][11] and thin metallo-organic films [12][13][14][15][16][17][18][19][20]. The deposition from solid state metallo-organic film offers the advantage of increased safety and ease of handling.…”

Selective metallization of alumina by laser

“…Maskiess laser-induced deposition of metals on metaffic and non-metallic substrates has recently become a field of growing interest [1]. Processes using laser-induced metal deposition from the gas phase [2,3], solid phase [4][5][6][7][8][9] and liquid phase [10-161have been reported. Every technique has advantages and disadvantages, depending on the application.…”

“…Deposition from the solid phase has been demonstrated with thin solid films of metallo-organics or organometallic components [4][5][6][7][8][9].Copper lines have been drawn from copper acetate [5] and formate [6,7], palladium from its acetate [8] and gold and platinum from its metallo-organic materials containing ink or resinates [4,9]. In some cases of laser-induced deposition from thin solid films, the process is exothermic and leads to irregular line profiles.…”

“…Little work has been done on direct metaffization of non-conducting ceramic substrates, excepting the work of Harish et at. [5], in which copper acetate was decomposed on alumina ceramic from a thin film. Metallo-organics have the advantage of decomposing at lower temperatures.…”

Excimer laser‐induced deposition of copper films

“…Thin copper lines as well as films have been deposited from a paste of copper formate and glycerol using an excimer laser (Ritz et al, 1987), from copper formate films on silica and glass using an Ar' laser (Gupta and Jagannathan, 1987), Correspondence concerning this paper should be addressed to S. V. Babu. and from copper acetate using an Nd:YAG laser (Harish et al, 1988). Conducting films and lines have also been obtained by decomposing Cu(I1) (hfac), photothermally in the gas phase (Houle et al, 1985;Markwalder et al, 1989).…”