1991
DOI: 10.1016/0169-4332(91)90398-4
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Laser-induced prenucleation of alumina for electroless plating

Abstract: This paper deals with the deposition of palladium from decomposition of a thin palladium acetate layer on rough and porous alumina ceramic surfaces by irradiating it with a UV excimer laser. The palladium acetate layer was formed from a combination of propyl glycol methyl ether acetate solvent and photoresist, and the undecomposed material was removed with the photoresist remover. The discontinuous palladium cluster film formed by the technique was used as seed for electroless coatings. Different patterns were… Show more

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Cited by 14 publications
(5 citation statements)
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References 20 publications
(21 reference statements)
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“…Surface patterning is an important technique for micromachine electric devices and high density recording systems, and it is mostly performed by photolithography. [1][2][3][4] Photolithography, however, involves many steps and uses toxic reagents, and there have been investigations of direct patterning methods with laser-enhanced electroplating [5][6][7][8][9] and electroless-plating. 10,11 In a previous study, the authors developed a novel method of surface patterning, in which metal is deposited at a selected area on aluminum by means of laser irradiation and electroplating or electroless plating.…”
mentioning
confidence: 99%
“…Surface patterning is an important technique for micromachine electric devices and high density recording systems, and it is mostly performed by photolithography. [1][2][3][4] Photolithography, however, involves many steps and uses toxic reagents, and there have been investigations of direct patterning methods with laser-enhanced electroplating [5][6][7][8][9] and electroless-plating. 10,11 In a previous study, the authors developed a novel method of surface patterning, in which metal is deposited at a selected area on aluminum by means of laser irradiation and electroplating or electroless plating.…”
mentioning
confidence: 99%
“…Laser-assisted electroless deposition and laser-induced prenucleation have been used to create selective seeds. [18][19][20][21][22][23] A palladium polyacrylic acid film is attached to the substrate and irradiated by a KrF excimer laser. Palladium ions are thus reduced to Pd 0 to become catalytic nuclei in subsequent electroless plating.…”
mentioning
confidence: 99%
“…Laser-assisted deposition has also been investigated for microstructure fabrication. [21][22][23][24][25] Generally, a UV excimer laser is used to assist the electroless deposition or induce metal seeding locally at room temperature. This technique is mainly applied to nonconductors such as polymers, ceramics, glass, etc.…”
mentioning
confidence: 99%
“…The movement of the specimen was computer-controlled in three dimensions, and a diagram of this experimental setup is detailed elsewhere. 25 In a preliminary experiment, the laser beam diameter on the focal plane was determined at about 400 m by measuring the spot size of the filmremoved area produced with one pulsed laser shot.…”
mentioning
confidence: 99%