1998
DOI: 10.1116/1.590211
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Direct writing of active loads by focused ion beams

Abstract: With a 100 nm focus of a focused Ga+ ion beam with 100 keV, we write insulating lines in electronic layers of In0.21Ga0.79As quantum wells. In this way, in-plane-gate (IPG) transistors are formed which can be operated at room temperature. In a typical integration application of a common source circuit, the pull-up resistance represents a serious problem due to the high geometric aspect ratio necessary for it. For example, the typical specific sheet resistivity of the In0.19Ga0.79As quantum well of 1.2 kΩ needs… Show more

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Cited by 21 publications
(9 citation statements)
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References 14 publications
(12 reference statements)
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“…The depletion region width of a 2D p-n junction, which is the "piston travel" in the above pump, depends linearly on the applied voltage [13][14][15] and is given by ( )…”
Section: Resultsmentioning
confidence: 99%
“…The depletion region width of a 2D p-n junction, which is the "piston travel" in the above pump, depends linearly on the applied voltage [13][14][15] and is given by ( )…”
Section: Resultsmentioning
confidence: 99%
“…The central circular trap gate is surrounded by a guard gate which is separated from a trap gate by a 100 nm narrow (slit) ungated region for insulation. Suitably biased by voltage V G below the flat band voltage of V FB it defines the outside surface potential to enable the formation of IXs and creates a depletion zone 7,46 around the trap gate perimeter, thus providing the confinement for IX. Fig.…”
Section: The Electrostatic Trapping Principle Of the Quantum Trapsmentioning
confidence: 99%
“…4(a) [14]. Here, we apply the analogous gate effect on the depletion length d de in a coplanar capacitor with that in a sandwich capacitor [15]. In a 2DEG with density n 2D and side-gate depletion voltage U de , d de~Ude ͞n 2D .…”
Section: Selective Control Of Electrons In Quantum Wires Formed By Himentioning
confidence: 99%