Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Liao, Yang; Cheng, Ya; Liu, Changning; Song, Jiangxin; He, Fei; Shen, Y.F.; Chen, Danping; Xu, Zhizhan; Fan, Zhichao; Wei, Xunbin; Sugioka, Koji; Midorikawa, Katsumi

doi:10.1039/c3lc41171k

Cited by 119 publications

(83 citation statements)

References 48 publications

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“…The resolution of this fabrication technique is very high, indeed the volume modified by the focused femtosecond laser beam, limited only by diffraction, can be as small as a few hundreds of nanometers, which, after etching, could produce microchannels with a diameter of a few micrometers. In addition, it is possible to further improve the resolution by properly choosing the irradiation parameters and exploiting the selfassembled nanostructuring of the modified volume 25 , paving the way for nanofluidic networks. The accuracy of this fabrication method is also high, thanks in large part to the use of high precision motion stages for the sample translation and accurate control of the etching conditions.…”

Section: Materials and Methods Fabricationmentioning

confidence: 99%

Particle focusing by 3D inertial microfluidics

et al. 2017

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Three-dimensional (3D) particle focusing in microfluidics is a fundamental capability with a wide range of applications, such as on-chip flow cytometry, where high-throughput analysis at the single-cell level is performed. Currently, 3D focusing is achieved mainly in devices with complex layouts, additional sheath fluids, and complex pumping systems. In this work, we present a compact microfluidic device capable of 3D particle focusing at high flow rates and with a small footprint, without the requirement of external fields or lateral sheath flows, but using only a single-inlet, single-outlet microfluidic sequence of straight channels and tightly curving vertical loops. This device exploits inertial fluidic effects that occur in a laminar regime at sufficiently high flow rates, manipulating the particle positions by the combination of inertial lift forces and Dean drag forces. The device is fabricated by femtosecond laser irradiation followed by chemical etching, which is a simple two-step process enabling the creation of 3D microfluidic networks in fused silica glass substrates. The use of tightly curving three-dimensional microfluidic loops produces strong Dean drag forces along the whole loop but also induces an asymmetric Dean flow decay in the subsequent straight channel, thus producing rapid cross-sectional mixing flows that assist with 3D particle focusing. The use of out-of-plane loops favors a compact parallelization of multiple focusing channels, allowing one to process large amounts of samples. In addition, the low fluidic resistance of the channel network is compatible with vacuum driven flows. The resulting device is quite interesting for high-throughput on-chip flow cytometry.

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Section: Materials and Methods Fabricationmentioning

confidence: 99%

Particle focusing by 3D inertial microfluidics

et al. 2017

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“…Moreover, self-assembled polarization-dependent nanogratings induced inside porous glass have recently been reported to be reduced to a single sub-50nm-wide nanochannel by the near-threshold-ablation technique, and this kind of single nanochannel has further been employed as building blocks of a 3D micro-nanofluidic device which has been used to demonstrate DNA analysis. [12][13] These research progress opens new opportunities of self-assembled nanostructures in 3D micro-nanofluidic application.…”

Section: Introductionmentioning

confidence: 99%

Self-organized voids revisited: Experimental verification of the formation mechanism

Song¹,

Ye²,

Qian³

et al. 2014

Chinese Phys. B

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“…Further reduction to a level very near to the ablation threshold results in only a single cycle of the modulated energy distribution in the central area of the focal volume ( Fig. 7(c)), which creates a single line nanogroove [53][54][55][56]. Using this scheme, an array of single nanogrooves with widths less than 40 nm were fabricated on ZnO, as shown in the SEM image of Fig.…”

Section: Far-field Ablationmentioning

confidence: 99%

“…700 nm and arbitrary geometry have been fabricated in fused silica using low-energy femtosecond laser pulses near the ablation threshold that are tightly focused by a high-NA objective lens [104]. Further enhancement of the performance of WAFLD to fabricate microfluidic channels with almost unlimited lengths, arbitrary geometries, and widths far less than the diffraction limit has been demonstrated by the ablation of mesoporous glass immersed in water followed by post-annealing [53,54,105]. The pores in porous glass that form a 3D connective network enable the more efficient supply of water to the ablation site, which results in the efficient removal of debris from the ablated regions to create unprecedented micro-and nanochannels.…”

Section: D Microfluidics and Optofluidicsmentioning

confidence: 99%

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Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

Self Cite

152

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Cited by 119 publications

References 48 publications

Particle focusing by 3D inertial microfluidics

Particle focusing by 3D inertial microfluidics

Self-organized voids revisited: Experimental verification of the formation mechanism

Progress in ultrafast laser processing and future prospects

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