“…The design procedure for HF micromechanical filters is virtually identical to that for the previous MF filters, differing only in the specific equations used [33]. Electromechanical analogies are again utilized to design this filter, the bandwidth is again dictated by (6), and again, quarter-wavelength coupling beams and low-velocity coupling are utilized to achieve small-percent bandwidths accurately. For clamped-clamped beam resonators, low velocity coupling is very easily achieved by merely moving the coupling location away from the center of the beam, as shown in Fig.…”