Frequency-selective MEMS for miniaturized low-power communication devices

Nguyen, C.T.-C.

doi:10.1109/22.780400

Cited by 232 publications

(91 citation statements)

References 28 publications

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“…(12); and thus 165 strong mode aliasing would occur. This is illustrated by a simulation using an equivalent RLC electrical circuit model of the 3DoF weakly coupled resonator system [28]. The values used in the simulation are chosen to be close to the device design, and are listed in Table 1.…”

Section: Mode Aliasing Effectmentioning

confidence: 99%

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Zhao

Wood

Xie

et al. 2015

Sensors and Actuators A: Physical

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A force sensor based on three weakly coupled resonators with ultrahigh sensitivity, Sensors & Actuators: A. Physical (2015), http://dx.doi.org/10.1016/j.sna. 2015.05.011 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. AbstractA proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested in 20µTorr vacuum. Compared to the conventional single resonator force sensor with frequency shift as output, by measuring the amplitude ratio of two of the three resonators, the measured force sensitivity of the 3DoF sensor was 4.9 × 10 6 /N, which was improved by two orders magnitude. A bias stiffness perturbation was applied to avoid mode aliasing effect and improve the linearity of the sensor. The noise floor of the amplitude ratio output of the sensor was theoretically analyzed for the first time, using the transfer function model of the 3DoF weakly coupled resonator system. It was shown based on measurement results that the output noise was mainly due to the thermalelectrical noise of the interface electronics. The output noise spectral density was measured, and agreed well with theoretical estimations. The noise floor of the force sensor output was estimated to be approximately 1.39nN for an assumed 10Hz bandwidth of the output signal, resulting in a dynamic range of 74.8dB.

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Section: Mode Aliasing Effectmentioning

confidence: 99%

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Zhao

Wood

Xie

et al. 2015

Sensors and Actuators A: Physical

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“…In terms of variables from Fig. 2, and assuming for now that the tuning electrodes and are given the same dc potential as the beam, this force can be expressed as (1) where and are the voltages applied to the electrode and conductive resonator beam, respectively, is the input electrode-to-resonator capacitance, which is a function of both displacement and time , and is the effective change in resonator-to-electrode capacitance per unit displacement, given by (2) shown at the bottom of the page, where is the total resonator stiffness (including both mechanical and electrical components) at location , is evaluated at , is a function describing the mode shape of the beam during resonance, is the permittivity in vacuum, and geometric variables are defined in Figs. 1(b) and 2.…”

Section: Mixler Structure and Operationmentioning

confidence: 99%

Micromechanical Mixer-Filters (“Mixlers”)

Wong¹,

Nguyen

2004

J. Microelectromech. Syst.

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167

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“…This indicates that the vibrational energy is inclined to be predominantly confined to the first mode when δ approaches zero from the even energy proportion point, which is different from the variation trend under the SRD scheme. This can be explained by the fact that the second mode shape ([1, − 1]) of the tuned system is ideally orthogonal to the external force vector [1,1] T , which makes the magnitude of the second mode 0 at the veering point. With an increase of the stiffness perturbation, the eigenvector of the second mode is no longer equal to the ideal value ([1, − 1]) because the amplitude ratio varies with the change in the stiffness perturbation:…”

Section: Quantitative Description Of Localizationmentioning

confidence: 99%

“…Microelectromechanical systems (MEMS) resonators have been widely used in various applications such as communications [1][2][3] , medical diagnostics 4,5 , and inertial navigation [6][7][8] . Typically, the structural parameters of the resonant element change with the addition of ambient physical/chemical quantities 9 .…”

Section: Introductionmentioning

confidence: 99%

Characterization of forced localization of disordered weakly coupled micromechanical resonators

2017

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The mode localization phenomenon of disordered weakly coupled resonators (WCRs) is being used as a novel transduction scheme to further enhance the sensitivity of micromechanical resonant sensors. In this paper, two novel characteristics of mode localization are described. First, we found that the anti-resonance loci behave as a linear function of the stiffness perturbation. The antiresonance behavior can be regarded as a new manifestation of mode localization in the frequency domain, and mode localization occurs at a deeper level as the anti-resonance approaches closer to the resonance. The anti-resonance loci can be used to identify the symmetry of the WCRs and the locations of the perturbation. Second, by comparing the forced localization responses of the WCRs under both the single-resonator-driven (SRD) scheme and the double-resonator-driven (DRD) scheme, we demonstrated that the DRD scheme extends the linear measurement scale while sacrificing a certain amount of sensitivity. We also demonstrated experimentally that the amplitude ratio-based sensitivity under the DRD scheme is approximately an order of magnitude lower than that under the SRD scheme, that is, the amplitude ratio-based sensitivity is − 70.44% (N m −1 ) −1 under the DRD scheme, while it is − 785.6% (N m −1 ) −1 under the SRD scheme. These characteristics of mode localization are valuable for the design and control of WCR-based sensors.Keywords: anti-resonance; eigenvalue loci veering; energy confinement; forced localization; mode localization; weakly coupled resonators For the MEMS community, a more interesting application is to use MDOF micromechanical coupled resonators in sensors with ultra-high sensitivity. Researchers have developed strongly coupled resonators using frequency splitting as the output metric to improve the sensitivity by more than 20% 13 . Using weakly coupled resonators (WCRs) and taking the eigenstate or amplitude ratio as the output metric can enhance the sensitivity by more than 2 orders of magnitude 14 . A variety of sensors based on WCRs with different degrees of sensitivity enhancement have been implemented, such as mass sensors 14-17 , electrometers 18,19 , stiffness sensors 20,21 , accelerometers 22 , and tilt sensors 23 .Mode localization is the theoretical basis for the sensitivity improvement of WCRs-based sensors. As a manifestation of Anderson localization 24 in the field of structural dynamics, mode localization [25][26][27][28][29][30] has been studied for more than three decades. When mode localization occurs, the WCRs exhibit drastic energy confinement on a specific mode. Energy confinement, which is the

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Frequency-selective MEMS for miniaturized low-power communication devices

Cited by 232 publications

References 28 publications

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Micromechanical Mixer-Filters (“Mixlers”)

Characterization of forced localization of disordered weakly coupled micromechanical resonators

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