Micromechanical Mixer-Filters (“Mixlers”)

Abstract

[796]

Exploiting nonlinearities of micro-machined resonators for filtering applications

“…[18][19][20][21][22][23] Furthermore, various designs of resonators have been explored, such as ring shaped and rectangular plate resonators, to achieve high-Q high-frequency filter operation. [24][25][26] Parametric resonances, 27 32,33 In this work, we present a technique that combines the hardening and softening responses of The proposed filter consists of two nearly identical laterally actuated clamped-clamped microbeams. Each microbeam is anchored from its two ends with two fixed electrodes.…”

UHF Micromechanical Compound-(2,4) Mode Ring Resonators With Solid-Gap Transducers

“…In particular, as shown in [7], a differential mechanical filter is much less susceptible to overlap capacitance C o than its single-ended counterpart, since it allows for complete cancellation of C o via inductive resonance. In addition, the feedthrough issue is really only problematic for single-ended filters constructed in all conductive materials, since the feedthrough path can be broken by simply using a nonconductive material somewhere in the filter structure, such as done in [10], where the coupling links were made nonconductive. Furthermore, some oscillator designs, such as the popular Pierce configuration, rely on overlap capacitance to provide phase shifts for proper operation.…”

Active N-path Filters: Theory and Design

“…There has been tremendous research on capacitive-transduction resonators due to their high compatibility with CMOS fabrication processes and their simplicity [60,61,62,63,64,65,66,67,68,69,70,71,72,73,74,75,76]. This has led to a large number of different structures for this type of resonators.…”

“…This has led to a large number of different structures for this type of resonators. In [62], it is proposed to exploit the mechanical nonlinearity of the resonator to achieve a Mixer-Filter ("Mixler"). Moreover, in [77], an interesting idea of resonant-gate transistor has been proposed which operates as a frequency-selective transistor.…”

“…One of the main issues of the capacitive-transduction resonators is their very large impedance level (e.g., 791 kΩ at f res = 1.5 GHz) compared to resonators based on piezoelectric materials (e.g., 0.65 Ω at f res = 2 GHz) [60,61,62,63,64,65,66,67,68,69,70,71,72,73,74,75,76]. One way to reduce the impedance level of these resonators is to exploit a large number of them in parallel as shown in Fig.…”