2005
DOI: 10.1016/j.vacuum.2004.12.002
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Dielectric properties of sol–gel derived Ta2O5 thin films

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Cited by 29 publications
(21 citation statements)
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“…These methods are perfectly suited for low temperature fabrication, including conventional printing methods allowing integration with cheap and flexible substrates. However, reproducibility and high quality films are still difficult to obtain [53,54,55,56,57]. Physical methods such as thermal evaporation and sputtering represent an alternative for the production of ISFET devices.…”
Section: Field Effect Biosensors Architecturementioning
confidence: 99%
“…These methods are perfectly suited for low temperature fabrication, including conventional printing methods allowing integration with cheap and flexible substrates. However, reproducibility and high quality films are still difficult to obtain [53,54,55,56,57]. Physical methods such as thermal evaporation and sputtering represent an alternative for the production of ISFET devices.…”
Section: Field Effect Biosensors Architecturementioning
confidence: 99%
“…As tantalum oxide is widely used in many different domains like microelectronics [8], electrochromic [9,10], and biomedical applications [11], numerous deposition methods were developed and detailed in the literature [12][13][14][15][16]. Among others, electroreduction in ionic liquid [13][14][15][16] and the sol-gel method [14,15,17,18] are the most studied ones and already demonstrated their applicability and usefulness in such applications.…”
Section: Introductionmentioning
confidence: 99%
“…Sol-gel deposition of thin films of tantala on glass supports has been reported previously by several authors [25][26][27][28]. In the cited studies, the thickness ranged from 75 to 327 nm.…”
Section: Resultsmentioning
confidence: 77%