“…Among these coatings, tantalum oxide (Ta x O y ) film has recently attracted much attention due to its advantages such as excellent corrosion resistance, good biocompatibility, and good wear resistance, as well as its ability to inhibit the growth of bacteria [18,19,20,21]. At present, various techniques for preparing Ta x O y film have been reported, including magnetron sputtering [18,19,20,21,22], liquid phase deposition (LPD) [23,24], electrochemical deposition [25], pulsed laser deposition (PLD) [26], atomic layer deposition (ALD) [27] and sol-gel method [28,29]. It is pointed out that the magnetron sputtering, with thus fabricated films’ characteristics of high density and uniformity, high strong adhesion, low processing temperature, and easy-controlling film structure/composition, will be the ideal techniques for Ta x O y films preparation [30,31].…”