Summary: Highly crystalline ferroelectric polymer films [vinyidene fluoride and trifluoroethylene, β‐P(VDF‐TrFE), 260–15 nm thick] were characterized with FTIR reflectance‐transmission microspectroscopy (FTIR‐RTM) mapping technique (400 µm × 400 µm spatial resolution). The amorphous and crystalline fractions were identified locally. FTIR‐RTM maps (1 cm2 area) provided a unique in‐depth view of the ultrathin films. Lower film thickness suppressed growth of the crystalline phase. Increased content of amorphous phase lead to non‐uniform films with degraded ferroelectric behavior.