The structures of ultra‐thin films of vinylidene fluoride and trifluoroethylene copolymer were characterized using Fourier transform infrared reflection absorption spectroscopy (FTIR‐RAS), FTIR transmission spectroscopy (FTIR‐TRS), atomic force microscopy, and wide‐angle X‐ray diffraction. The ferro‐electricity was determined from polarization charge (a displacement (D)–electric field (E) hysteresis). FTIR‐RAS and FTIR‐TRS measurements showed that the molecular chains of polymers (crystal c‐axis) near the substrate tended to align parallel to the substrate. However, thermal annealing of the sample films at temperatures above 145 °C caused a marked change in molecular alignment of the polymer chains (crystal c‐axis) from parallel to normal to the substrate, and, further, caused a conformation change from trans to partially gauche forms. Copyright © 2007 Society of Chemical Industry