Diaphragm deflection of silicon interferometer structures used as pressure sensors

Xiao, Z.; Engström, Olof; Vidovic, Nevio

doi:10.1016/s0924-4247(96)01398-2

Cited by 18 publications

(6 citation statements)

References 9 publications

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“…Changes in height alter the reflective properties of the cavity. Thus, a light beam from the control unit, reflected by the cavity and sent back into the unit, will detect the pressure (Xiao et al 1997).…”

Section: Introductionmentioning

confidence: 99%

Novel Method for Measuring Tissue Pressure in Herbaceous Plants

Caliaro

Flues

Speck

et al. 2013

International Journal of Plant Sciences

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Tissue pressure is of vital importance for the stability and stiffness as well as metabolic functions of herbaceous plants and has been studied for more than a century. Several measurement methods have been established but require either sophisticated equipment at a fixed v^iorkplace or being applicable only to flat structures. We were looking for a mobile system that can be used under greenhouse conditions for long-term measurement of parenchymatous tissue pressure. The mobile sensor system used consists of a micro-optic-mechanical system with a silicon sensor at the tip of a glass fiber and a control unit (Samba 202) for data logging. The sensors were inserted and became ingrown in succulent leaves of Delosperma cooperi, petioles of Caladium bicolor, and flower stalks of Cyclamen persicum. With this method, three distinct phases could be distinguisbed in the restoration of the parenchymatous tissue pressure after embedding the sensors without drought stress. Under drought stress, three additional phases were found during wilting of C. bicolor petioles. All plants showed photoperiodic fluctuations of tissue pressure. The results of the tissue pressure measurements were cross-checked by measurements of individual parenchyma cells from the same tissue region using a cell pressure probe. The new method for measuring plant tissue pressure is promising for monitoring parenchymatous tissue pressure during physiological experiments on herbaceous plants and complements the established methods of turgor determination.

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Section: Introductionmentioning

confidence: 99%

Novel Method for Measuring Tissue Pressure in Herbaceous Plants

Caliaro

Flues

Speck

et al. 2013

International Journal of Plant Sciences

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“…Optical sensors are of great interest for application in aerospace because their immunity to EMI can provide a significant weight savings through the elimination of cable shielding and surge protection electronics. Optical sensors also showed proven success in biomedical field resulting from their reliability and biocompatibility and the simplicity of the sensor physician interface [20,22,24,26]. Optical sensors have the advantage of the contacless measurement capability.…”

Section: Introductionmentioning

confidence: 99%

Modeling of Vibration Sensing with Variable Fabry-Perot System

Mohamed¹

2013

Optics

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The application of Fabry-Perot (FP) system for vibration sensing is theoretically analyzed and successfully demonstrated by simulation. The separation between the reflecting mirrors of the FP is varying in accordance with the sensed vibration that is in contact with the freely movable mirror. The variable separation is modeled as a small uniform sinusoidal perturbation that satisfies the constructive multiple beam interference inside the cavity. The variation of the separation between the two mirrors of the FP induces a phase variation to the reflected laser beam employed in the system. The constructed signals by signals processing and transformation reveal the effectiveness of the method for vibration sensing and hence the applicability for gravitational and seismic waves monitoring.

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“…Currently, major challenges of implantable microsystems for chronic longterm use come from reliability, packaging, biocompatibility, absence of a mass market driver and long development time (Mokwa 2007;Receveur et al 2007;Ainslie and Desai 2008). Short or long-term implantable pressure sensors have been used to measure intra-ocular pressure (IOP) (Backlund et al 1990;Mokwa and Schnakenberg 1998;Puers et al 2000), intro-cranial pressure (ICP) (Cosman et al 1979;Flick and Orglmeister 2000), cardio vascular pressures (Puers et al 1990;Xiao et al 1997;Kalvesten et al 1998;Schnakenberg et al 2004;Allen 2005;Ohki et al 2007), and urodynamic pressure, etc. The goal of this study was to develop an implantable pressure sensor on LVAD inlet to measure LVP using Micro-Electro-Mechanical Systems (MEMS) technology.…”

Section: Introductionmentioning

confidence: 99%

An implantable Fabry-Pérot pressure sensor fabricated on left ventricular assist device for heart failure

Zhou

Yang

Liu

et al. 2011

Biomed Microdevices

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Continuous flow left ventricular assist devices (LVADs) are commonly used as bridge-to-transplantation or destination therapy for heart failure patients. However, non-optimal pumping speeds can reduce the efficacy of circulatory support or cause dangerous ventricular arrhythmias. Optimal flow control for continuous flow LVADs has not been defined and calls for an implantable pressure sensor integrated with the LVAD for real-time feedback control of pump speed based on ventricular pressure. A MEMS pressure sensor prototype is designed, fabricated and seamlessly integrated with LVAD to enable real-time control, optimize its performance and reduce its risks. The pressure sensing mechanism is based on Fabry-Pérot interferometer principle. A biocompatible parylene diaphragm with a silicon mirror at the center is fabricated directly on the inlet shell of the LVAD to sense pressure changes. The sensitivity, range and response time of the pressure sensor are measured and validated to meet the requirements of LVAD pressure sensing.

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Diaphragm deflection of silicon interferometer structures used as pressure sensors

Cited by 18 publications

References 9 publications

Novel Method for Measuring Tissue Pressure in Herbaceous Plants

Novel Method for Measuring Tissue Pressure in Herbaceous Plants

Modeling of Vibration Sensing with Variable Fabry-Perot System

An implantable Fabry-Pérot pressure sensor fabricated on left ventricular assist device for heart failure

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