Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement

Yamashita, K.; Nishimoto, Hiroki; Okuyama, Masanori

doi:10.1016/j.sna.2007.04.048

Cited by 39 publications

(17 citation statements)

References 6 publications

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“…For PZT film, to the authors' knowledge, there have been no meaningful data to compare with our results; a few data are available, but they are bulk properties and are also highly varied, depending on manufacturing processes [28], [29]. Since the values measured by both bulge test and nanoindentation are consistent (refer to Section III-D for the nanoindentation result), the value of ∼49 GPa can be regarded as the elastic modulus of PZT films.…”

Section: Uncertainty In the Measured Elastic Modulimentioning

confidence: 52%

Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Hong

Kim

Lee

et al. 2008

J. Microelectromech. Syst.

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Abstract-A bulge testing system was developed to mechanically characterize the deformation behaviors and elastic moduli of multilayered films, mainly composed of polycrystalline silicon (polysilicon) and lead zirconate titanate (PZT), used in a multilayer actuator of a piezoelectric inkjet head. In the tests, commercial inkjet heads including a few tens of multilayer actuators were directly pressurized by air, and the corresponding deflections were measured via full-field optical measurement techniques. An analytic solution derived from a thin-plate theory and finite-element analysis were used to describe pressure-deflection behaviors of films, and the results were compared with the experimental data to evaluate the elastic modulus of individual film. The results showed that the elastic moduli of polysilicon and PZT films are ∼110 and ∼49 GPa, respectively. These values were consistent with the nanoindentation results. For polysilicon films, about 30% reduction in elastic modulus, compared with that calculated from single-crystal elastic constants, was observed, and this was most likely attributed to the presence of microdefects like voids and microcracks at grain boundaries between columnar grains.[ 2008-0056]Index Terms-Bulge test, full-field optical measurement, multilayered films, piezoelectric inkjet head.

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Section: Uncertainty In the Measured Elastic Modulimentioning

confidence: 52%

Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Hong

Kim

Lee

et al. 2008

J. Microelectromech. Syst.

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“…The diaphragms of the elements deflect upward or downward as each thin film in the multilayer has different internal stresses induced in the fabrication processes at high temperature. When an ultrasonic wave is applied to the sensor, the diaphragm including the piezoelectric PZT thin film receives two kinds of stresses: expansion and bending components [19]. Figure 4 shows the calculation results of expansion stress, S e , bending stress, S b , and total stress, S, as a function of deflection at the center of the diaphragm, ζ m [16].…”

Section: Enhancement Of Sensitivitymentioning

confidence: 99%

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Okuyama¹,

Yamashita²,

Noda³

et al. 2012

Transactions on Electrical and Electronic Materials

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Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO 2 and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or Si:B + piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

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“…This layered structure tends to show a static deflection caused by residual stress of each layer. The static deflection has strong effect to the sensitivity due to combination of lateral strains in the diaphragm caused by bending and by lateral expansion [11]. The sensitivity can be much improved by making an adequate static deflection on the diaphragm through the lateral strain control.…”

Section: Introductionmentioning

confidence: 99%

Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors

Yamashita

Watanabe

Yoshizaki

et al. 2011

Sensors and Actuators A: Physical

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Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement

Cited by 39 publications

References 6 publications

Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors

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