Diamond synthesis from gas phase in microwave plasma

Kamo, Mutsukazu; Sato, Yoichiro; Matsumoto, Shinya; Setaka, Nobuo

doi:10.1016/0022-0248(83)90411-6

Cited by 935 publications

(184 citation statements)

References 11 publications

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“…The Swan band associated with the carbon dimer has been previously reported in supercritical carbon dioxide [2][3]. Generally, C 2 is generated in plasmas where a high density of atomic carbon exists [6]. The results shown in Fig.…”

Section: Resultssupporting

confidence: 58%

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Plasma optical emission spectroscopy in supercritical fluid for material synthesis process

Suga

Watanabe

2010

Trans. Mat. Res. Soc. Japan

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Section: Resultssupporting

confidence: 58%

“…Generally, diamonds are synthesized from CH 4 and H 2 by plasma CVD under low pressure [6]. In this process, CH 4 is the carbon source, and the growth species is CH 3 .…”

Section: Resultsmentioning

confidence: 99%

Plasma optical emission spectroscopy in supercritical fluid for material synthesis process

Suga

Watanabe

2010

Trans. Mat. Res. Soc. Japan

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“…A Japanese group, the National Institute for Research in Inorganic Materials (NIRIM), first published a remarkable series of papers in which different techniques, hot-filament CVD process, RF-plasma CVD, and microwave plasma CVD were described [33][34][35][36]. They reported that diamond particles and films could be deposited on various substrates heated around 850 °C, using a mixed gas of methane diluted by hydrogen, and preferred partial pressures in the range 4×10 3 to 5×10 3 Pa. A growth rate higher than several microns per hour was achieved.…”

Section: Development In Diamond Synthesis By Cvdmentioning

confidence: 99%

“…From that time until the late 1980s, virtually all of the significant developments reported have been due to Japanese work. These include the development of filament-assisted thermal CVD [33,34], electron-assisted thermal CVD [39,40], laser-assisted thermal CVD [41], RF-plasma CVD [42], microwave-plasma CVD [35], combustion flame-assisted CVD [43], direct-current arc plasma jet CVD [44], etc.…”

Section: Cvd Systemsmentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

251

156

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This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

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“…Only Chemical Vapor Deposition (CVD) can provide diamond films (8)(9). The CVD method is essential to developing diamond devices.…”

Section: Introductionmentioning

confidence: 99%

Superconductivity in polycrystalline diamond thin films

Takano

Nagao

Takenouchi

et al. 2005

Diamond and Related Materials

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Superconductivity was discovered in heavily boron-doped diamond thin films deposited by the microwave plasma assisted chemical vapor deposition (MPCVD) method. Advantages of the MPCVD deposited diamond are the controllability of boron concentration in a wide range, and a high boron concentration, especially in (111) oriented films, compared to that of the high-pressure high-temperature method.The superconducting transition temperatures are determined to be 8.7K for Tc onset and 5.0K for zero resistance by transport measurements. And the upper critical field is estimated to be around 7T.2

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Diamond synthesis from gas phase in microwave plasma

Cited by 935 publications

References 11 publications

Plasma optical emission spectroscopy in supercritical fluid for material synthesis process

Plasma optical emission spectroscopy in supercritical fluid for material synthesis process

Diamond growth by chemical vapour deposition

Superconductivity in polycrystalline diamond thin films

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