1992
DOI: 10.1049/el:19920095
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DFB-LD/modulator integrated light source by bandgap energy controlled selective MOVPE

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Cited by 76 publications
(10 citation statements)
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“…We used the selective area MOVPE growth technique, it is well known that the thickness of a layer grown on an open stripe region between mask stripes increases with the increase of the mask stripe width [7][8]. This growth technique is very attractive for fabricating longitudinal bandgap modulated superluminescent diodes (LBM-SLDs), because an optical-waveguide structure with different bandgap energy toward the waveguide direction can be formed by selective area growth.…”
Section: Design and Fabricationmentioning
confidence: 99%
“…We used the selective area MOVPE growth technique, it is well known that the thickness of a layer grown on an open stripe region between mask stripes increases with the increase of the mask stripe width [7][8]. This growth technique is very attractive for fabricating longitudinal bandgap modulated superluminescent diodes (LBM-SLDs), because an optical-waveguide structure with different bandgap energy toward the waveguide direction can be formed by selective area growth.…”
Section: Design and Fabricationmentioning
confidence: 99%
“…Control of the band gap energy in multiquantum well structures and its application to practical photonic integrated devices using selective area growth was reported and demonstrated almost simultaneously by two groups. 13,14 We applied this technique to control where self-assembled quantum dots form. A 30-nm-thick SiO 2 film was formed on a ͑100͒ GaAs substrate by plasma chemical vapor deposition.…”
Section: Area-controlled Growth Of Inas Quantum Dots and Improvement mentioning
confidence: 99%
“…Combined with selective area growth (SAG), it is considered to be the most feasible technique for the monolithic integration of optoelectronic circuits (OEICs). [5][6][7] By designing operating parameters and mask patterns, components that require appropriate film thickness and composition in OEICs could be precisely integrated by SAG technique. Because multiple-quantum-well (MQW) structures have been widely used in all types of OEICs, such thickness and composition control become much more relevant and important for industrial applications.…”
Section: Introductionmentioning
confidence: 99%