2008
DOI: 10.1155/2008/678948
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Developments in Gigascale Silicon Optical Modulators Using Free Carrier Dispersion Mechanisms

Abstract: This paper describes the recent advances made in silicon optical modulators employing the free carrier dispersion effect, specifically those governed by majority carrier dynamics. The design, fabrication, and measurements for two different devices are discussed in detail. We present an MOS capacitor-based modulator delivering 10 Gbps data with an extinction ratio of 4 dB and a pn-diode-based device with high-speed transmission of 40 Gbps and bandwidth greater than 30 GHz. Device improvements for achieving high… Show more

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Cited by 27 publications
(13 citation statements)
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References 44 publications
(58 reference statements)
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“…Potentially CMOS compatible, low-cost, monolithic silicon WDM modulator chips have been reported [1,2]. However, an optically broadband silicon-based modulator usually has a large footprint and requires a relatively high driving voltage and hence high power consumption for sufficient extinction ratio [3]. Alternatively, purely III-V WDM modulator chips have been demonstrated [4, 5].…”
Section: Introductionmentioning
confidence: 99%
“…Potentially CMOS compatible, low-cost, monolithic silicon WDM modulator chips have been reported [1,2]. However, an optically broadband silicon-based modulator usually has a large footprint and requires a relatively high driving voltage and hence high power consumption for sufficient extinction ratio [3]. Alternatively, purely III-V WDM modulator chips have been demonstrated [4, 5].…”
Section: Introductionmentioning
confidence: 99%
“…Since the modulator is based on a single hybrid plasmonic waveguide, it is more compact than a Mach-Zehnder Interferometer (MZI) modulator where two separate waveguides are necessary to enable the optical interference. It should be noted that the proposed modulator is essentially an interference structure rather than a resonance one, therefore allowing for broadband operation [22], [23]. Fig.…”
Section: Introductionmentioning
confidence: 99%
“…The bandwidth of the silicon modulator is limited due to the lack of efficient electro-optic effect and electroabsorption effect in pure silicon. Most of the reported silicon modulators rely on the free carrier plasma dispersion effect [4][5][6][7]. In those cases, a weak change of the refractive index obtained by carrier accumulation, injection or depletion is utilized in a Mach-Zehnder interferometer [4,5] or a microring resonator [6] to achieve intensity modulation.…”
Section: Introductionmentioning
confidence: 99%
“…In those cases, a weak change of the refractive index obtained by carrier accumulation, injection or depletion is utilized in a Mach-Zehnder interferometer [4,5] or a microring resonator [6] to achieve intensity modulation. 40 Gbit/s transmission has been demonstrated on a carrier-depletionbased silicon modulator, although that device has a large footprint and requires high driving voltage for a sufficient extinction ratio [7].…”
Section: Introductionmentioning
confidence: 99%