Development of Y-Shaped Filtered-Arc-Deposition System for Preparing Multielement Composition-Controlled Film

Tanoue, Hideto; Hikosaka, H.; Mashiki, Takayuki; Oke, Shinichiro; Suda, Yoshiyuki; Takikawa, Hirofumi; Hasegawa, Yushi; Taki, Makoto; Kamiya, Masao; Ishikawa, Takeshi; Yasui, Haruyuki

doi:10.1109/tps.2009.2014765

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Experimental Procedures 21 Apparatus Outline1

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“…A HD-DLC film was prepared with reduced mixing of droplets emitted from the cathode spot in a film using filtered arc deposition (FAD) [7] with solid graphite as the raw material. Figure 2 schematically depicts the FAD apparatus, which is equipped with a vacuum arc plasma source with a graphite cathode, and which is connected to a film preparation process chamber through a plasma magnetic transport duct.…”

Section: Experimental Procedures 21 Apparatus Outlinementioning

confidence: 99%

Influence of Film Density on Adhesions of HD-DLC Films Prepared by FAD System

Takago

Yasui

Taki

2012

Trans. Mat. Res. Soc. Japan

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In this study, the high density diamond-like carbon (HD-DLC) with hydrogen-free was developed using filtered-arc-deposition (FAD) system. Mechanical properties of HD-DLC were evaluated. Relationship between film density and the adhesive strength from scratch test was discussed. It was found that the hardness is 80-90 GPa, the wear coefficient of HD-DLC is 0.1. The amount of losses of energy decreased at about 50%. Obtained the value of density of HD-DLC film is 3.4 g/cm 3 , which is 1.5 times than conventional DLC films. Furthermore, the adhesion strength of HD-DLC improved with increase of film density under bias voltage.

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Section: Experimental Procedures 21 Apparatus Outlinementioning

confidence: 99%