2015
DOI: 10.1007/s11434-014-0705-8
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Development of solid-state nanopore fabrication technologies

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Cited by 70 publications
(44 citation statements)
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“…This pore size is achievable with MoS2 monolayers but difficult to realize with SiNx membranes. [53,86,87] However, the noise level for solid-state nanopores is seldom smaller than 1 pA, [61,64,65,88] which is also seen in figure 4(b). Even we consider a more ideal case by referring to figure 3(a), ΔImin=1 pA is found for the same nanopore of dp=5 nm and h=5 nm.…”
Section: Way Forwardmentioning
confidence: 70%
“…This pore size is achievable with MoS2 monolayers but difficult to realize with SiNx membranes. [53,86,87] However, the noise level for solid-state nanopores is seldom smaller than 1 pA, [61,64,65,88] which is also seen in figure 4(b). Even we consider a more ideal case by referring to figure 3(a), ΔImin=1 pA is found for the same nanopore of dp=5 nm and h=5 nm.…”
Section: Way Forwardmentioning
confidence: 70%
“…In this review we focus mainly on strategies for fabricating solid‐state single nanopores or nanochannels, we thus omit a comprehensive description of procedures that allow the production of multipore materials, such as sol–gel techniques or the production of anodized aluminum oxide. Synthetic methods for solid‐state single pore fabrication have been reviewed extensively and many of them will not be described in detailed here . Among the different techniques available for the fabrication of single nanopores, ion beam and electron beam techniques are by far the most commonly used ones.…”
Section: Fabrication Techniquesmentioning
confidence: 99%
“…This particular interest in peptide detection is amplified by their potential involvement in the onset of cancer, neurodegenerative disorders, and infections 1719 , as well as established correlations between their expression levels and diseases 2022 . While synthetic nanopores are considered scalable and more robust both chemically and mechanically, their production with desired dimensions and sub-nanometer precision is still a challenging task 23–25 . In contrast, nanopores of biological origin present outstanding structural repeatability at the atomic level and are more amenable to chemical modification and sophisticated bio-engineering procedures intended to significantly extend their sensing capabilities 6, 2628 .…”
Section: Introductionmentioning
confidence: 99%