Development of novel multi-selective slurry with mechanically driven etching for through silicon via chemical mechanical polishing

Kim, Eungchul; Choi, Sanghwan; Jeon, Sanghuck; Seok, Hyunho; Cho, Jin-ill; Shin, Dayeon; Kim, Taesung

doi:10.1016/j.mssp.2022.107025

Cited by 3 publications

(1 citation statement)

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“…To uphold the CoCrMo alloy surface quality in this CMP process, BTA is added, proving critical for enhancing the longevity of artificial knee joints. The BTA functions as an effective corrosion inhibitor, hindering undesirable surface reactions [ 29 , 30 ]. When the alloy is immersed in a BTA-containing solution, a passive layer is formed, comprising a complex between the alloy and the benzotriazole.…”

Section: Resultsmentioning

confidence: 99%

Nanoscale Surface Refinement of CoCrMo Alloy for Artificial Knee Joints via Chemical Mechanical Polishing

Zhang,

Lai

et al. 2023

Materials

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In this study, we address the challenge of surface roughness in CoCrMo alloys, typically used in artificial knee joints, which can initiate a cascade of biological responses causing inflammation, osteolysis, joint instability, and increased susceptibility to infection. We propose the application of a chemical mechanical polishing (CMP) technique, using an ecologically responsible slurry composed of 4 wt% SiO2, 0.3 wt% H2O2, 1.0 wt% glycine, and 0.05 wt% benzotriazole. Our innovative approach demonstrated significant improvements, achieving a material removal rate of 30.9 nm/min and reducing the arithmetic mean roughness from 20.76 nm to 0.25 nm, thereby enhancing the nanoscale surface quality of the artificial knee joint alloy. The smoother surface is attributed to a decrease in corrosion potential to 0.18 V and a reduction in corrosion current density from 9.55 µA/cm2 to 4.49 µA/cm2 with the addition of BTA, evidenced by electrochemical tests. Furthermore, the preservation of the phase structure of the CoCrMo alloy, as confirmed by XRD analysis and elemental mapping, ensures the structural integrity of the treated surfaces. These outcomes and our simulation results demonstrate the effectiveness of our CMP method in engineering surface treatments for artificial knee joints to optimize friction behavior and potentially extend their lifespans.

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Section: Resultsmentioning

confidence: 99%