Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass

Park, Hae-Seok; Hwang, Jaeyeon; Choi, Won‐Youl; Shim, Dong-Sik; Na, Kyoung-Won; Choi, Sang-On

doi:10.1016/j.sna.2003.11.037

Cited by 43 publications

(17 citation statements)

References 10 publications

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“…Focusing on these advantages, we have prepared a fluxgate sensor using an electroplated Fe-Ni-Co thick-film ( 20 m) [1]. Owing to high economic viability of fabrication process, an electroplating is a hopeful method to obtain soft magnetic cores in fluxgate sensors, and some researchers also reported fluxgate sensors using electroplated soft magnetic alloys [2][3].…”

Section: Introductionmentioning

confidence: 99%

Effect of Ammonium Chloride in Plating Baths on Soft Magnetic Properties of Electroplated Fe–Ni Films

et al. 2017

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We electroplated Fe-Ni films in plating baths with ammonium chloride (NH4Cl) and evaluated the magnetic properties of the films. The amount of NH4Cl did not affect the current efficiency of the plating process and the Fe content in the film. The obtained current efficiency of approximately 95% is much higher than our previous study. The coercivity dramatically decreased with increasing NH4Cl from 0 to 15 g/L, and we obtained Fe22Ni78 films with very low coercivity (10 A/m). The Cl -concentration in the plating bath affected the coercivity, and we found that a plating bath with moderate low concentration of Cl -is preferred for obtaining the Fe22Ni78 films with low coercivity.

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Section: Introductionmentioning

confidence: 99%

Effect of Ammonium Chloride in Plating Baths on Soft Magnetic Properties of Electroplated Fe–Ni Films

et al. 2017

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“…This introduces non-standard steps to the microfabrication process flow. There are a few microfabricated closed core fluxgate examples available in the literature which use conventional thin film technologies such as sputtering, evaporation and electroplating [7,8]. On the other hand, these sensors utilize solenoidal coils both for excitation and detection, complicating the fabrication process, increasing the sensor area due to the large number of required via connections, and increasing the power dissipation of the sensor.…”

Section: Introductionmentioning

confidence: 99%

A closed core microfluxgate sensor with cascaded planar FeNi rings

Zorlu¹,

Kejı́k²,

Teppan³

2010

Sensors and Actuators A: Physical

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a b s t r a c tIn this paper, we present a new microfabricated fluxgate sensor structure using cascaded planar rings as the ferromagnetic core. The planar ring structures provide closed magnetic excitation loops enabling uniform core saturation with relatively small excitation magnetic field. The magnetic excitation is provided with a rod passing through the ring cores. Planar coils placed under the edges of the core are used as sensing elements. By using this structure, fluxgate sensors having a closed core configuration are realized with a developed microfabrication process in a very small area (<0.1 mm 2 ) with reduced number of via connections. The ferromagnetic rings are realized with a standard FeNi (iron-nickel) electroplating process. The main advantage of this structure is the possibility to arrange the linear operation range of the sensor by only changing the number of ring cores, without affecting the excitation mechanism. This is demonstrated by simulations and microfabricated prototypes having 18 and 12 ring cores with ±300 T and ±550 T linear operation ranges, respectively. A maximum linear operation range of ±2 mT is achieved with a larger size, 4-ring core. This is the widest linear operation range achieved with the microfabricated fluxgate type sensors, without using a feedback loop, to the best of our knowledge.

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“…Traditional fluxgate sensor has the disadvantages of large volume, large weight and high cost. The miniature of this device which named micro fluxgate sensor, will get many attractive features of small size, light weight, low consumption, high sensitivity, high resolution, integration of signal processing circuits and so on (Park et al 2004).…”

Section: Introductionmentioning

confidence: 99%

Electroplating a magnetic core for micro fluxgate sensor

et al. 2008

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A square-ring shaped micro fluxgate sensor, which was designed for measuring two axes weak magnetic field at the same time, was fabricated using MEMS technologies. To get better magnetic properties, Ni/Fe permalloy was selected to be the materials of magnetic core which was fabricated by DC-electroplating method with several micron thickness. Saccharine was added into the electrolyte to reduce the internal stress, and its influence on magnetic properties was studied. The results show that magnetic properties are related to the crystalline phase transition in the deposition which varied with saccharine content. With 3 g/L saccharine in the electrolyte, a film with low coercive force and high saturation magnetization relatively was obtained and some characters of the sensor were also discussed in the paper.

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Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass

Cited by 43 publications

References 10 publications

Effect of Ammonium Chloride in Plating Baths on Soft Magnetic Properties of Electroplated Fe–Ni Films

Effect of Ammonium Chloride in Plating Baths on Soft Magnetic Properties of Electroplated Fe–Ni Films

A closed core microfluxgate sensor with cascaded planar FeNi rings

Electroplating a magnetic core for micro fluxgate sensor

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