In this paper, we present the newly developed high Q Film Bulk Acoustic Resonator (FBAR) which has the piezoelectric AlN film sandwiched between two electrode films and mesa-shaped membrane structure by utilizing poly-Si and XeF2 as a sacrificial layer and dry release gas, respectively. By controlling the etching profile of bottom electrode and sacrificial layer, the poor formation of AlN in the edge region of mesa-shaped membrane could be eliminated. In addition, by reducing the parasitic overlap which both of the electrodes and the piezoelectric layer resides directly on the substrate, we could improve the characteristics of resonator and filter. When we compare with the typical surface micro-
In this paper, miniaturized fluxgate sensor with high sensitivity is presented by increasing the permeability of magnetic material. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and closely coupled solenoid excitation and pick-up coils. In order to induce magnetic anisotropy, the magnetic core (permalloy) was electroplated under the external magnetic field of 7000 gauss. We designed three types of fluxgate sensors with the change of magnetic core size and turn numbers of solenoid coil. Excellent linear responses of these sensors were obtained with more than 117 V/T sensitivity over the range of -200 T to + 200 T . And the size of the smallest micro-fluxgate sensor was about 1.3 0.7 mm 2 excluding pad region.
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