Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool

Wang, Wei; Kweon, Sung-Hwan; Hwang, Chang-Soon; Kang, Namcheol; Kim, Young-Suk; Yang, Seung-Han

doi:10.1007/s00170-008-1743-7

Cited by 21 publications

(8 citation statements)

References 8 publications

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“…Similar methods were introduced by Liu et al [27,28]. Wang et al presented a method based on laser collimation for a miniaturized machine tool [29]. Gao et al proposed a measurement system using a surface encoder [30,31].…”

Section: Introductionmentioning

confidence: 96%

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Zheng

Feng

Zhang

et al. 2020

Int J Adv Manuf Technol

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Error compensation has become an important means of improving the manufacturing and processing accuracy of computer numerical control (CNC) machine tools. Quick and precise measurement of the various geometric motion errors (GMEs) of CNC machine tools is crucial. We propose a novel laser method for the efficient and direct high-precision measurement of the 21 GMEs of a three-axis CNC machine tool, or three linear axes of a five-axis tool. A corresponding system was developed, comprising a fiber-coupled laser unit, sensor head, target unit, and beam-steering unit. The beam-steering unit was designed to perform high-accuracy 90°rotation of the measuring beam, and the target unit was designed to be sensitive to 18 GMEs of the three linear axes. Stability, repeatability, and comparison experiments were conducted to verify the performance of the proposed system. The results showed that the stability of the position error measurement is ± 6.3 nm. For straightness error measurement, the stability, repeatability error, and residual are within ± 60.3 nm, ± 0.5 μm, and ± 0.7 μm, respectively. These are within ± 0.12 arcsec, ± 0.5 arcsec, and ± 0.5 arcsec for the pitch and yaw measurements, and within ± 0.37 arcsec, ± 1.5 arcsec, and ± 1.0 arcsec for the roll measurements, respectively. For squareness error measurement, the repeatability error and residual are within ± 0.6 arcsec and ± 1.6 arcsec, respectively. Compared with a laser interferometer, the proposed system can measure the 21 GMEs of a three-axis machine tool with one-step installation. Without accuracy loss, the measurement efficiency is approximately 45 times higher than that of a laser interferometer, thus providing a new quick and accurate measurement method of GMEs and error compensation of CNC machine tools.

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Section: Introductionmentioning

confidence: 96%

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Zheng

Feng

Zhang

et al. 2020

Int J Adv Manuf Technol

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“…Moreover, the measurement accuracy is extremely susceptible to long-term environmental changes, reducing the overall accuracy. To improve the measurement efficiency, various methods of simultaneously measuring the 6DOF geometric errors of the linear axes of machine tools have been extensively studied, including methods based on the combination of laser interferometry and laser collimation [19][20][21], laser collimation [22,23], surface encoders [24,25], and diffraction gratings [26][27][28]. In addition, some commercial instruments have been developed, including API 5D/6D measuring instrument and Renishaw laser 6D simultaneous measurement system.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Jia

Zhang

Zheng

et al. 2021

Meas. Sci. Technol.

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The geometric error measurement of computer numerical control (CNC) machine tools is developing towards automation and high precision. This not only improves the measurement efficiency, but also reduces the error caused by the long measurement time. This paper proposes a high-efficiency, automatic method of measuring 21 geometric errors of the three linear axes of CNC machine tools and establishes a comprehensive measurement model. The measurement system and model are applicable to linear axis geometric error measurement for all CNC machine tools. The measurement model was developed using rigid body kinematics theory and combined with the ray-tracing method. It mainly analyses the error crosstalk, system errors caused by optical components, laser beam drift, and non-parallelism errors between the measuring beams. ZEMAX was used to verify the model accuracy. Further, repeatability and comparison experiments were conducted to confirm the reliability and accuracy of the measurement system and model.

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“…The system has high requirements for the parallelism of the three beams, and adjustment is difficult [17]. W. Wang developed an integrated geometric error optical measurement system for a three-axis miniaturized machine tool and used a homogeneous transformation matrix to calculate the geometric error of six degrees of freedom [18]. In addition, some researchers have used spectroscopic devices to reduce the number of light sources and pyramid prisms [19,20] or special prisms [21][22][23] as cooperative targets.…”

Section: Introductionmentioning

confidence: 99%

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

et al. 2020

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A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are ± 2.5 ″ and ± 3.5 ″ without correction, and the residuals are ± 1.9 ″ and ± 2.8 ″ after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from ± 4.8 μ m to ± 2.8 μm and ± 5.9 μm to ± 3.6 μm, respectively. The comparison deviation of the roll is ± 4.3 ″ . The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.

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Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool

Cited by 21 publications

References 8 publications

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

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