The emphasis on structural design of miniaturized machine tool (mMT) used in micro-machining process is different from that of conventional machine tool due to requirement of higher precision and stable performance. In this paper, structural modeling and simulation of 3-axis vertical micro-end-milling system is presented. Based on different components combination, three models of linear multi-degree-of-freedom vertical milling systems are constructed theoretically using high precision stages. The most suitable model is chosen by volumetric error calculation. Finite element method (FEM) is used for simulation of those numerical solid models. Static and dynamic analysis with different joint stiffness and loads is simulated by ANSYS. Prototype model is assembled according to the selected structure. Finally, surface roughness of the bottom of micro slots, which are machined by prototype model, is analyzed to verify the performance of mMT.
Recently, miniaturized machine tools (mMT) have become a promising micro/meso-mechanical manufacturing technique to overcome the material limitation and produce complex 3D meso-scale components with higher accuracy. To achieve sub-micron accuracy, geometric errors of a miniaturized machine tool should be identified and compensated. An optic multi-degree-of-freedom (DOF) measuring system, composed of one laser diode, two beam splitters and three position sensing detectors (PSDs), is proposed for simultaneous measurement of horizontal straightness, vertical straightness, pitch, yaw and roll errors along a moving axis of mMT. Homogeneous transformation matrix (HTM) is used to derive the relationship between the readings of PSDs and geometric errors, and an error estimation algorithm is presented to calculate the geometric errors. Simulation is carried out to prove the estimation accuracy of this algorithm. In theory, the measurement resolution of this proposed system can reach up to 0.03 μm and 0.06 arcsec for translational and rotational errors, respectively.
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