Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Abstract

The geometric error measurement of computer numerical control (CNC) machine tools is developing towards automation and high precision. This not only improves the measurement efficiency, but also reduces the error caused by the long measurement time. This paper proposes a high-efficiency, automatic method of measuring 21 geometric errors of the three linear axes of CNC machine tools and establishes a comprehensive measurement model. The measurement system and model are applicable to linear axis geometric error measurement for all CNC machine tools. The measurement model was developed using rigid body kinematics theory and combined with the ray-tracing method. It mainly analyses the error crosstalk, system errors caused by optical components, laser beam drift, and non-parallelism errors between the measuring beams. ZEMAX was used to verify the model accuracy. Further, repeatability and comparison experiments were conducted to confirm the reliability and accuracy of the measurement system and model.

Measurement of six-degree-of-freedom geometric errors of a translation stage using three absolute position encoders

“…This adaptability is crucial to overcome challenges such as restricted installation space and potential interference with other components of the stage system. Furthermore, if these measuring instruments can accurately measure multiple key performance indices using a single configuration, the efficiency of on-site evaluations would be further enhanced [3][4][5][6][7][8][9][10].…”

“…Multi-axis motions of precision stages have been assessed using various optical measurement techniques, employing specially designed or arranged reflectors on the moving platform of the stage [3][4][5][6][7][8]. To measure straightness and angular motion errors, multiple position-sensitive detectors (PSDs) detect variations in the positions and directions of reflected beams.…”

“…To measure straightness and angular motion errors, multiple position-sensitive detectors (PSDs) detect variations in the positions and directions of reflected beams. Additionally, a laser interferometer evaluates the positional error along the translational axis [4,[6][7][8]. However, achieving optimal performance requires aligning multiple reflectors and recalibrating their positions each time they are set up, potentially making these methods inefficient for on-site evaluations.…”

Measurement and identification method for geometric errors of the linear axis based on laser interferometer optimal measurement parameters method

“…The result indicates the effectiveness of the method, but the whole measurement procedures need several bidirectional sequential step in the cuboidal workspace. To improves measurement efficiency, Peizhi et al 19 proposed a method to measure the six degrees of freedom geometric errors of linear axis simultaneously. It achieve an acceptable identification results, but the measurement instruments require a specific design.…”

A data-driven high-precision modeling method of machine tool spatial error under the influence of Abbe error

“…And for the direct measurement method,in order to realize the measurement of the single error of the machine tool, the optical instrument is mainly used to identify the changes in the reflected optical path of the optical mirror group as the machine tool moves. Such methods include laser tracker measurements [12,13] , laser interferometers [14][15][16] and 1D spherical error array measurements [17] . The laser interferometer measurement method is widely used due to the advantages of measurement efficiency and it has become the main research direction on error compensation.…”