2010
DOI: 10.1016/j.talanta.2009.09.013
|View full text |Cite
|
Sign up to set email alerts
|

Development of an on-line isotope dilution laser ablation inductively coupled plasma mass spectrometry (LA–ICP-MS) method for determination of boron in silicon wafers

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
9
0

Year Published

2010
2010
2018
2018

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 19 publications
(9 citation statements)
references
References 24 publications
0
9
0
Order By: Relevance
“…Reference materials preparation techniques including (1) pressed-powder pellets with (Jarvis and Williams, 1993;O'Connor et al, 2007) and without (Arroyo et al, 2009;Garbe-Sch€ onberg and Müller, 2014) binders; (2) fused glasses with (Becker and Dietze, 1999;Eggins, 2003;Perkins et al, 1993) and without flux agent (Fedorowich et al, 1993;He et al, 2016;Jochum et al, 2000;Kurosawa et al, 2006;Nehring et al, 2008;Norman et al, 1996;Reid et al, 1999;Stoll et al, 2008;Zhu et al, 2013). Solution-based calibration method (Becker, 2002;Dressler et al, 2010;Günther et al, 1997;Kovacs et al, 2009;Leach et al, 1999;Thompson et al, 1989;Yang et al, 2010) can be applied in the absence of suitable solid reference materials. Although much effort has been expended in finding ways to produce multi-element solid reference materials cheaply and rapidly, the number of off-the-shelf commercially available solid reference materials is very limited (Jochum and Stoll, Gilbert et al (2013) 2008) ( Table 2).…”
Section: External Calibrationmentioning
confidence: 99%
“…Reference materials preparation techniques including (1) pressed-powder pellets with (Jarvis and Williams, 1993;O'Connor et al, 2007) and without (Arroyo et al, 2009;Garbe-Sch€ onberg and Müller, 2014) binders; (2) fused glasses with (Becker and Dietze, 1999;Eggins, 2003;Perkins et al, 1993) and without flux agent (Fedorowich et al, 1993;He et al, 2016;Jochum et al, 2000;Kurosawa et al, 2006;Nehring et al, 2008;Norman et al, 1996;Reid et al, 1999;Stoll et al, 2008;Zhu et al, 2013). Solution-based calibration method (Becker, 2002;Dressler et al, 2010;Günther et al, 1997;Kovacs et al, 2009;Leach et al, 1999;Thompson et al, 1989;Yang et al, 2010) can be applied in the absence of suitable solid reference materials. Although much effort has been expended in finding ways to produce multi-element solid reference materials cheaply and rapidly, the number of off-the-shelf commercially available solid reference materials is very limited (Jochum and Stoll, Gilbert et al (2013) 2008) ( Table 2).…”
Section: External Calibrationmentioning
confidence: 99%
“…To eliminate the inconvenience of preparing an isotopically-enriched solid spike, online isotope dilution LA-ICP-MS equipped with a gas sample introduction system was developed. [15][16][17] Trace elements in solid samples could be quantitatively analyzed by the convenient online ID-LA-ICP-MS arrangement, and this method was also suitable for compact samples. However, whether isotopic equilibrium has been reached aer the incomplete mixing process of the aerosols needs to be fully investigated.…”
Section: Introductionmentioning
confidence: 99%
“…32 Another study on online-ID-LA-ICPMS was published by Yang et al in 2010, who determined boron in silicon wafers. 33 They introduced the 10 B spike aerosol after the ablation chamber via nebulization through a cross-flow nebulizer (wet aerosol). 33 In 2014, Fernańdez et al presented the "double ID-MS" mode, in which both the sample and a CRM are analyzed sequentially by ablation and online addition of the isotopically enriched spike.…”
mentioning
confidence: 99%
“…33 They introduced the 10 B spike aerosol after the ablation chamber via nebulization through a cross-flow nebulizer (wet aerosol). 33 In 2014, Fernańdez et al presented the "double ID-MS" mode, in which both the sample and a CRM are analyzed sequentially by ablation and online addition of the isotopically enriched spike. 34 Douglas et al refined this concept of online double IDA to determine the sample mass flow from laser ablation.…”
mentioning
confidence: 99%
See 1 more Smart Citation