Development of an electromagnetic micro-generator

Shearwood, C.; Yates, Robert D.

doi:10.1049/el:19971262

Cited by 179 publications

(94 citation statements)

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“…For a typical device, the predicted power generation was 1 µW for an excitation frequency of 70 Hz, and 100 µW at 330 Hz [83]. Shearwood and Yates from the University of Sheffield, UK [84] have fabricated a generator based on the design. It comprises a flexible circular membrane, which was bulk micromachined on a GaAs substrate coated with a 7 µm layer of polyimide.…”

Section: Wafer-scale Implementationsmentioning

confidence: 99%

Energy harvesting vibration sources for microsystems applications

Beeby

Tudor

White

2006

Meas. Sci. Technol.

2,603

1,468

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This paper reviews the state-of-the art in vibration energy harvesting for wireless, self-powered microsystems. Vibration-powered generators are typically, although not exclusively, inertial spring and mass systems. The characteristic equations for inertial-based generators are presented, along with the specific damping equations that relate to the three main transduction mechanisms employed to extract energy from the system. These transduction mechanisms are: piezoelectric, electromagnetic and electrostatic. Piezoelectric generators employ active materials that generate a charge when mechanically stressed. A comprehensive review of existing piezoelectric generators is presented, including impact coupled, resonant and human-based devices. Electromagnetic generators employ electromagnetic induction arising from the relative motion between a magnetic flux gradient and a conductor. Electromagnetic generators presented in the literature are reviewed including large scale discrete devices and wafer-scale integrated versions. Electrostatic generators utilize the relative movement between electrically isolated charged capacitor plates to generate energy. The work done against the electrostatic force between the plates provides the harvested energy. Electrostatic-based generators are reviewed under the classifications of in-plane overlap varying, in-plane gap closing and out-of-plane gap closing; the Coulomb force parametric generator and electret-based generators are also covered. The coupling factor of each transduction mechanism is discussed and all the devices presented in the literature are summarized in tables classified by transduction type; conclusions are drawn as to the suitability of the various techniques.

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Section: Wafer-scale Implementationsmentioning

confidence: 99%

Energy harvesting vibration sources for microsystems applications

Beeby

Tudor

White

2006

Meas. Sci. Technol.

2,603

1,468

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“…Such alternative solutions for providing electrical energy to systems may include solar energy (Hamakawa, 2003), thermal energy (Sodano et al, 2006) or mechanical energy. When dealing with small-scale systems, the latter energy source has been of particular interest as vibrations are widely available in many environments (Shearwood and Yates, 1997;Beeby et al, 2007). In addition, the use of piezoelectric transducers for converting mechanical energy into electricity has attracted much attention as such materials offer high energy densities and promising integration potentials, making them a premium choice for the conception of embeddable microgenerators (Anton and Sodano, 2007;Blystad, Halvorsen and Husa, 2008).…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Conversion Enhancement for Efficient Piezoelectric Electrical Generators

Guyomar¹,

Lallart²

2010

Ferroelectrics

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“…In order to illustrate how this is affected by the choice of load resistance, we assume that the motion of the device can be described as a single degree of freedom, damped mass-spring system, as described in [2,4,5]. If we assume that the device is operated at resonance, i.e.…”

Section: Magnetic Modellingmentioning

confidence: 99%

“…The most common ambient sources are solar, vibration and thermal. In this work, we have used the principle of electromagnetic induction for the generation of electrical energy from kinetic energy present in the environment in the form of vibrations [2][3][4][5]. An earlier device developed at the University of Southampton was around 3,000 mm 3 in volume and was fabricated using conventional machining techniques [6].…”

Section: Introductionmentioning

confidence: 99%

Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

et al. 2006

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This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm 3 . ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7-4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s À1 ) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials.

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Development of an electromagnetic micro-generator

Cited by 179 publications

References 0 publications

Energy harvesting vibration sources for microsystems applications

Energy harvesting vibration sources for microsystems applications

Nonlinear Conversion Enhancement for Efficient Piezoelectric Electrical Generators

Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

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