Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

Koukharenko, Elena; Beeby, Steve; Tudor, John; White, NM; O’Donnell, Terence; Saha, Chinmoy; Kulkarni, Santosh; Roy, Saibal

doi:10.1007/s00542-006-0137-8

Cited by 84 publications

(42 citation statements)

References 7 publications

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“…The advantage of this arrangement is to maximize the flux gradient by vibrating the coils from a region of positive flux to negative flux. Fabrication details of Prototype A have been described previously [11].…”

Section: Fabrication and Assembly Processmentioning

confidence: 99%

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Kulkarni

Koukharenko

Tudor

et al. 2008

Sensors and Actuators A: Physical

125

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This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially micro-fabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a deep reactive ion etched (DRIE) silicon beam and paddle. Prototype C uses moving NdFeB magnets in between two micro-fabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-electro-mechanical systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s 2 acceleration. For Prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s 2 , at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other micro-fabricated silicon-based generators reported in literature. This generator has a volume of 0.1 cm 3 which is lowest of all the silicon-based micro-fabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 586 nW across 110 load at 60 Hz for an acceleration of 8.829 m/s 2 .

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Section: Fabrication and Assembly Processmentioning

confidence: 99%

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Kulkarni

Koukharenko

Tudor

et al. 2008

Sensors and Actuators A: Physical

125

View full text Add to dashboard Cite

show abstract

“…Ahmad et al [13] designed a paddletype sensor using the COVENTOR software. Other researchers [14,15] investigated a micro-generator consisting of a silicon paddle-type element. Ouakad [8] studied the e ect of shock loading on performance of a paddle-type gas sensor.…”

Section: Introductionmentioning

confidence: 99%

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

et al. 2017

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Abstract. The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the DuanAdomian Method (DAM), Finite Di erence Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the in uence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance.

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“…It generated 0.3μW of output power at the resonant frequency of 4MHz and the optimal load resistance of 39Ω [6][7]. Recently, several electromagnetic energy harvesters were reported using cantilever structures and mass-spring-damper systems [8][9][10][11][12][13][14][15][16][17]. These devices were comprised of single steel beam, coils, and magnets which were attached to the end of the beam.…”

Section: Introductionmentioning

confidence: 99%

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

Bang¹,

Park²

2013

Journal of Electrical Engineering and Technology

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-In this paper, two different electromagnetic energy harvesters using bulk micromachined silicon spiral springs and Polydimethylsiloxane (PDMS) packaging technique have been fabricated, characterized, and compared to generate electrical energy from ultra-low ambient vibrations under 0.3g. The proposed energy harvesters were comprised of a highly miniaturized Neodymium Iron Boron (NdFeB) magnet, silicon spiral spring, multi-turned copper coil, and PDMS housing in order to improve the electrical output powers and reduce their sizes/volumes. When an external vibration moves directly the magnet mounted as a seismic mass at the center of the spiral spring, the mechanical energy of the moving mass is transformed to electrical energy through the 183 turns of solenoid copper coils. The silicon spiral springs were applied to generate high electrical output power by maximizing the deflection of the movable mass at the low level vibrations. The fabricated energy harvesters using these two different spiral springs exhibited the resonant frequencies of 36Hz and 63Hz and the optimal load resistances of 99Ω and 55Ω, respectively. In particular, the energy harvester using the spiral spring with two links exhibited much better linearity characteristics than the one with four links. It generated 29.02μW of output power and 107.3mV of load voltage at the vibration acceleration of 0.3g. It also exhibited power density and normalized power density of 48.37μW·cm-3 and 537.41μW·cm-3·g-2, respectively. The total volume of the fabricated energy harvesters was 1cm x 1cm x 0.6cm (height).

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Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

Cited by 84 publications

References 7 publications

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

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