Development and characterization of a novel configurable MEMS inertial switch using a microscale liquid-metal droplet in a microstructured channel

Yoo, Kwanghyun; Park, Usung; Kim, Joonwon

doi:10.1016/j.sna.2009.12.008

Cited by 45 publications

(30 citation statements)

References 18 publications

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“…To simplify device fabrication and to prevent mechanical fatigue, the MDA employs a microscale liquid metal droplet as a proof-mass and measures acceleration using the movement of the liquid metal droplet in the device channel. This sensing mechanism has been reported previously [10,11]. Photosensitive glass can be easily definable using ultraviolet (UV) light; this property simplifies fabrication of a channel with the desired shape and internal microstructured surface.…”

Section: Introductionsupporting

confidence: 55%

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Park

Yoo

Kim

2010

Sensors and Actuators A: Physical

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Section: Introductionsupporting

confidence: 55%

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Park

Yoo

Kim

2010

Sensors and Actuators A: Physical

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“…The micro-fluidic inertial switch is a new type of micro acceleration switch, which replaces the traditional elastic solid electrode with the moving mercury droplet in the microchannel with varying rectangular cross section to sense the acceleration and close the signal electrodes. 4 The micro-fluidic inertial switch based on micro-electro-mechanical system (MEMS) technology has the advantages of small contact resistance, simple structure, and strong instantaneous a Author to whom correspondence should be addressed. Email: ljttlf@163.com overload capacity, 5 but it also needs to satisfy some requirements, such as short response time and strong anti-interference ability.…”

Section: Introductionmentioning

confidence: 99%

Vibration interference analysis and verification of micro-fluidic inertial switch

Liu

Yang

et al. 2014

AIP Advances

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The micro-fluidic inertial switch based on liquid metal utilizes the moving mercury droplet to close the switch under the action of acceleration, which is characterized by no moving parts, small contact resistance, long service life and large current. In addition to the requirement of response time, accuracy and reliability, the micro-fluidic inertial switch needs to overcome the impact of the ambient vibration. The influence of the ambient vibration on the performance of switch is investigated by loading pulse or sinusoidal interference signals in the X, Y and Z direction. The numerical results suggest that the performance of micro-fluidic inertial switch is greatly affected by impact interference signal in X sensitive direction as compared with low frequency harmonic signal. If the impact signal with high amplitude lasts only for a short time, the wrong operation might also occur. The interference signals in insensitive direction have a relatively small impact on the performance of switch, and the impact of interference signal can be reduced by reasonable structural design. Finally, anodic bonding, deep reactive ion etching (DRIE) and sputtering technique are adopted to fabricate the micro-fluidic inertial switch. The acceleration threshold of the prototype is tested. The experiment results agree with the numerical results, which indicate that the simulation method is valid.

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“…When the acceleration signal exceeds the acceleration threshold, the mercury droplet would move towards the sensitive direction and close the fixed signal electrodes. 1 Electrowetting was first identified by Lippmann in 1857. It is a well-known phenomenon of decrease in contact angle when an external electrical potential is applied to the solid/liquid interface.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology

Liu

Yang

et al. 2014

AIP Advances

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The switch based on electrowetting technology has the advantages of no moving part, low contact resistance, long life and adjustable acceleration threshold. The acceleration threshold of switch can be fine-tuned by adjusting the applied voltage. This paper is focused on the electrowetting properties of switch and the influence of microchannel structural parameters, applied voltage and droplet volume on acceleration threshold. In the presence of process errors of micro inertial fluidic switch and measuring errors of droplet volume, there is a deviation between test acceleration threshold and target acceleration threshold. Considering the process errors and measuring errors, worst-case analysis is used to analyze the influence of parameter tolerance on the acceleration threshold. Under worst-case condition the total acceleration threshold tolerance caused by various errors is 9.95%. The target acceleration threshold can be achieved by fine-tuning the applied voltage. The acceleration threshold trimming method of micro inertial fluidic switch is verified.

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Development and characterization of a novel configurable MEMS inertial switch using a microscale liquid-metal droplet in a microstructured channel

Cited by 45 publications

References 18 publications

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Vibration interference analysis and verification of micro-fluidic inertial switch

Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology

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