Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Park, Usung; Yoo, Kwanghyun; Kim, Joonwon

doi:10.1016/j.sna.2010.02.011

Cited by 28 publications

(20 citation statements)

References 27 publications

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“…The objective threshold acceleration can be configured based on the geometry of the micro-structured channel, the wetting property of the channel surface, and the working fluid. The commonly used working fluids are mercury [57][58][59] and Glycerol [60], which have the advantages of a high surface tension, high density, and electrical conduction. Yoo et al [57] reported that the micro-structured channel can enhance the non-wetting behavior while minimizing the contact angle hysteresis of the micro-droplet on the surface.…”

Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

“…Moreover, the response time of the device with the micro-structured channel was approximately 33% faster than that of the flat channel. Park et al [58] fabricated a micro-fluidic switch on a photosensitive glass to uniformly and simultaneously form an anisotropic micro-structured channel during the etching process, providing easy movement of the micro-droplet on the channel surface. Liu et al [59] investigated the influence of the ambient vibration on the performance of the micro-fluidic switch by applying pulse or sinusoidal interference signals in the X, Y, and Z directions.…”

Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

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Recent Advancements in Inertial Micro-Switches

et al. 2019

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Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on the sensitive direction, threshold acceleration, contact effect, and threshold accuracy of inertial micro-switches. The reviewed switches were categorized according to the performance parameters, including multi-directional switches, multi-threshold switches, persistent closed switches, flexible-electrode switches, and low-g high-threshold-accuracy switches. The current challenges and prospects are also discussed.

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Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Recent Advancements in Inertial Micro-Switches

et al. 2019

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“…19). MDA is mainly based on high surface tension, high density, and the electrical conductivity of liquid metal droplets [128].…”

Section: More New Conceptual Applicationsmentioning

confidence: 99%

“…20 Thermometric scale of some liquid metals Fig. 19 Overview of the MEMS digital accelerometer (MDA) [128] Re < 2300, ② transient is when 2300 < Re < 4000, and ③ turbulent is when 4000 < Re. However, liquid metals have totally different properties.…”

Section: Technical Challenges and Scientific Issuesmentioning

confidence: 99%

Revolutionizing heat transport enhancement with liquid metals: Proposal of a new industry of water-free heat exchangers

Jing

2011

Front. Energy

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Water is perhaps the most widely adopted working fluid in conventional industrial heat transport engineering. However, it may no longer be the best option today due to the increasing scarcity of water resources. Furthermore, the wide variations in water supply throughout the year and across different geographic regions also makes it harder to easily access. To address this issue, finding new alternatives to replace water-based technologies is imperative. In this paper, the concept of a water-free heat exchanger is proposed and comprehensively analyzed for the first time. The liquid metal with a low melting point is identified as an ideal fluid that can flexibly be used within a wide range of working temperatures. Some liquid metals and their alloys, which have previously received little attention in thermal management areas, are evaluated. With superior thermal conductivity, electromagnetic field drivability, and extremely low power consumption, liquid metal coolants promise many opportunities for revolutionizing modern heat transport processes: serving as heat transport fluid in industries, administrating thermal management in power and energy systems, and innovating enhanced cooling in electronic or optical devices. Furthermore, comparative analyses are conducted to understand the technical barriers encountered by advanced water-based heat transfer strategies and clarify this new frontier in heat-transport study. In addition, the unique merits of liquid metals that could lead to innovative heat exchanger technologies are evaluated comprehensively. A few promising industrial situations, such as heat recovery, chip cooling, thermoelectricity generation, and military applications, where liquid metals could play irreplaceable roles, were outlined. The technical challenges and scientific issues thus raised are summarized. With their evident ability to meet various critical requirements in modern advanced energy and power industries, liquid metal-enabled technologies are expected to usher a new and global era of water-free heat exchangers.

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“…To increase the simplicity and robustness of the accelerometer, Park et al developed an accelerometer using a liquid metal (LM) droplet (i.e., mercury) [10]. Because mercury has electrical conductivity (specific electrical resistance: 0.96 × 10 −6 Ω m) and high density (~13.5 g/ cm 3 ), Park et al used mercury as an electrode and proof mass simultaneously.…”

Section: Introductionmentioning

confidence: 99%

Simple and robust resistive dual-axis accelerometer using a liquid metal droplet

Huh

Won

Kim

et al. 2017

Micro and Nano Syst Lett

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This paper presents a novel dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes. The sensor uses the advantages of the liquid metal droplet (i.e., high surface tension, electrical conductivity, high density, and deformability). The cone-shaped channel imposes a restoring force on the liquid metal droplet. We conducted simulation tests to determine the appropriate design specifications of the cone-shaped channel. Surface modifications to the channel enhanced the nonwetting performance of the liquid metal droplet. The performances of the sensor were analyzed by a tilting test. When the acceleration was applied along the axial direction, the device showed ~6 kΩ/g of sensitivity and negligible crosstalk between the Xand Y-axes. In a diagonal direction test, the device showed ~4 kΩ/g of sensitivity.

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Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Cited by 28 publications

References 27 publications

Recent Advancements in Inertial Micro-Switches

Recent Advancements in Inertial Micro-Switches

Revolutionizing heat transport enhancement with liquid metals: Proposal of a new industry of water-free heat exchangers

Simple and robust resistive dual-axis accelerometer using a liquid metal droplet

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