Simple and robust resistive dual-axis accelerometer using a liquid metal droplet

Huh, Myoung; Won, Dong‐Joon; Kim, Joong Gil; Kim, Joonwon

doi:10.1186/s40486-016-0038-2

Cited by 9 publications

(15 citation statements)

References 13 publications

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“…The accelerations of the two axes are continuously measured using a cone‐shaped channel and four electrodes patterned in the x‐ and y‐ directions, respectively. [ 32 ] However, the relationship between the channel shape and Laplace pressure is yet to be identified. Both devices employ glass substrates as the electrodes, which has a relatively high sliding angle of ≈15°.…”

Section: Introductionmentioning

confidence: 99%

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Won

Huh

Lee

et al. 2020

Adv Elect Materials

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Utilizing the advantages of a liquid metal (LM) (i.e., mercury) and its electro‐mechanical properties (i.e., high density, high surface tension, and high electrical conductivity), a novel capacitive‐type two‐axis accelerometer is proposed. The device employs a liquid‐type proof mass (i.e., liquid metal droplet) and is located in a cone‐shaped guiding channel. The Laplace pressure induced by the guiding channel and the LM droplet in the device acts as a spring due to the high surface tension of LM. To accurately set the spring constant of the device, a 2D mathematical model is established. Based on this mathematical model, the influence of the channel shape on device sensitivity is analyzed. Despite measuring the two‐axis accelerations using a single proof mass, the accelerometer yields a cross‐axis sensitivity of less than 1% for the x‐ and y‐axes. The accelerometer demonstrates an output similar to that of a reference accelerometer for a randomly applied acceleration. Owing to the nature of the liquid‐type proof mass, even if it is destroyed, its functionality is recovered by simply shaking the accelerometer. Finally, a 1.4% change in the accelerometer output is observed in the 15 000‐cycle test, and the device is applied to a maze escape game for verification.

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Section: Introductionmentioning

confidence: 99%

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Won

Huh

Lee

et al. 2020

Adv Elect Materials

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“…Furthermore, the switch structure introduced a two-stage microvalve, which facilitated adjustment of the threshold by changing the mercury volume. Huh et al [ 96 ] designed a dual-axis accelerometer based on a liquid–metal droplet. The movement of droplet was leaded by the induced inertial force.…”

Section: Persistent Inertial Switchesmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.

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“…Several researchers are exploring new technologies and emerging methods to fabricate accelerometers that will offer an alternative paradigm for the manufacturing of these widely used sensors. Some of these recently developed sensors have shown great performance and are very promising. ,− 3D-printing technology is rapid, inexpensive, process-effective, and offers flexibility and customizability. In recent years, 3D printing has emerged as an innovative, highly customizable, and cheap fabrication procedure for various sensors, including accelerometers and inertial motion sensors .…”

Section: Acceleration Sensors Based On Emerging Technologies and Mate...mentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Simple and robust resistive dual-axis accelerometer using a liquid metal droplet

Cited by 9 publications

References 13 publications

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Research Progress of MEMS Inertial Switches

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

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