Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology

Liu, Tingting; Su, Wei; Yang, Tao; Bin, Han

doi:10.1063/1.4870243

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…It works as both a sensor and an actuator, and is normally open until the acceleration event occurs, significantly simplifying the complexity of the system and reducing the power requirement. Recently, with the advantages of small size, high integration level, and low cost [ 1 , 2 , 3 , 4 ], the micro-electro-mechanical-system (MEMS) technology-based inertial micro-switch is widely available in large-volume commercial applications, such as airbags, transportation systems, and geriatric healthcare [ 5 , 6 ]. The working principle of the inertial micro-switch is that a movable electrode (usually a proof mass suspended by compliant springs) contacts a fixed electrode when an acceleration exceeding the threshold value is applied, consequently shorting the external circuit.…”

Section: Introductionmentioning

confidence: 99%

Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Peng

Zhang

et al. 2016

Micromachines

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Squeeze-film damping and acceleration load are two major issues in the design of inertial micro-switches. In order to deeply and systematically study these two issues, this paper proposes a typical vertically-driven inertial micro-switch, wherein the air and electrode gaps were chosen to design the required damping ratio and threshold value, respectively. The switch was modeled by ANSYS Workbench, and the simulation program was optimized for computational accuracy and speed. Transient analysis was employed to investigate the relationship between the damping ratio, acceleration load, and the natural frequency, and the dynamic properties (including contact bounce, contact time, response time, and threshold acceleration) of the switch. The results can be used as a guide in the design of inertial micro-switches to meet various application requirements. For example, increasing the damping ratio can prolong the contact time of the switch activated by short acceleration duration or reduce the contact bounce of the switch activated by long acceleration duration; the threshold value is immune to variations in the damping effect and acceleration duration when the switch is quasi-statically operated; the anti-jamming capability of the switch can be improved by designing the sensing frequency of the switch to be higher than the acceleration duration but much lower than the other order frequencies of the switch.

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Section: Introductionmentioning

confidence: 99%

Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Peng

Zhang

et al. 2016

Micromachines

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Microfluidic inertial switch with delay response characteristics

Nie

Liu

Zhang

2020

J. Phys.: Conf. Ser.

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This paper proposes an innovation microfluidic inertial switch structure with precise time delay response characteristic, which can be used in the fuze safety and arming system. The switch works on the principle of fluidic inertial force and capillary valve, which makes it sensitive to the unidirection acceleration load and has the ability to recognize the acceleration amplitude. The microfluidic inertial switch has a structure of a J-shaped reservoir, capillary valves, a serpentine delay microchannel and a U-shaped latching microchannel. The acceleration threshold is analyzed theoretically considering the surface tension coefficient of the gas-liquid interface. The delay response time of the switch is studied by finite element simulation based on the Gambit 2.4 and Fluent 6.3 software. The prototype is fabricated by wet etching technology and magnetron sputtering metal technology. Many tests have been done to verify the functions of the switch. The experimental results are matched well to the results of calculation and simulation. When the capillary valve throat widths are 80μm, 120μm, 160μm, the thresholds of the switch are 75.1g, 46.6g, 36.5g. When the switch is loaded with a 75g acceleration load, the delay response is 146.7ms. Finite element simulation and experimental results show that the switch can effectively identify the acceleration threshold, and can achieve a precise delay response under a certain load.

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Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology

Cited by 2 publications

References 8 publications

Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Microfluidic inertial switch with delay response characteristics

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