2007
DOI: 10.1063/1.2735408
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Determination of the phosphorus content in diamond using cathodoluminescence spectroscopy

Abstract: In n-type diamond doped with phosphorus, exciton properties have been investigated by cathodoluminescence as a function of the phosphorus concentration and the temperature. The homoepitaxial diamond layers were grown by microwave plasma-assisted chemical vapor deposition and doped using a liquid organic precursor of phosphorus (tertiarybutylphosphine). The phosphorus concentration ranges from 5.2×1016 to 3.3×1018 cm−3 as measured by secondary ion mass spectrometry. It is shown that the ratio between the lumine… Show more

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Cited by 41 publications
(34 citation statements)
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“…: from the centre of the QDisk to about 5 nm away in both directions along the NW growth axis). This is very small when compared to the carrier diffusion in bulk GaN or AlN [54,40] or GaN nanowires, [64] revealing the strong carrier trapping capability of the QDisks. However in the present case, contrary to [40], a clear broadening in the spatial distribution of the detected signal arises at lower energy -a given QDisk appears broader on filtered map of smaller energy, indicating a link between excitation position and emission energy.…”
Section: Sample Experimental Methodsmentioning
confidence: 99%
“…: from the centre of the QDisk to about 5 nm away in both directions along the NW growth axis). This is very small when compared to the carrier diffusion in bulk GaN or AlN [54,40] or GaN nanowires, [64] revealing the strong carrier trapping capability of the QDisks. However in the present case, contrary to [40], a clear broadening in the spatial distribution of the detected signal arises at lower energy -a given QDisk appears broader on filtered map of smaller energy, indicating a link between excitation position and emission energy.…”
Section: Sample Experimental Methodsmentioning
confidence: 99%
“…As could be expected, the incorporation of P is higher in the layer grown with 500ppm as confirmed by the amplitude of the P-bound exciton signal. This is corroborated as well by significant broadening of the spectral when comparing the right and left parts of Figure 4.On single crystal diamond one can quantify the substitutional phosphorous concentration found in the diamond layer from the ratio between the BE and FE luminescence intensities [17], but due to the presence of grain boundaries complementary analyses making use of spot selected CL are requested for a precise estimation on these microcrystalline films. Nevertheless, it is safe to conclude that the intensity of the CL BE peak confirms the behavior seen in the PC spectra, which showed that a higher PH 3 concentration in the gas phase leads to higher active P-incorporation in the obtained diamond layer.…”
Section: Cathodoluminescence Resultsmentioning
confidence: 52%
“…Lett. 103, 042104 (2013) in SIMS measurements, [9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25] leading to systematic overestimates of the real width, similar to the case of silicon. 26 If this is the case, it is legitimate to ask how the layer thickness should be estimated from broadened SIMS profiles.…”
Section: -3mentioning
confidence: 94%
“…Doping level evaluation over micrometer-scale areas in diamond material can also be carried out by optical methods such as Raman 10 and FTIR. 11 Among these techniques, cathodoluminescence (CL) 12,13 is clearly the most sensitive 14 while ensuring a high spatial resolution since cross sectional analysis can be also carried out on FIB preparations. 15,16 However, the signal is too weak in heavily doped diamond to image the spatial distribution of dopants.…”
mentioning
confidence: 99%