1996
DOI: 10.1063/1.118052
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Determination of lattice polarity for growth of GaN bulk single crystals and epitaxial layers

Abstract: The polarity of the lattice of bulk single GaN crystals and the polarity of homoepitaxial and heteroepitaxial-on-sapphire GaN thin films has been studied using convergent beam electron diffraction. Diffraction patterns obtained at 200 kV for the 〈1–100〉 projection of GaN were matched with calculated patterns. The lattice orientations of two commonly observed bulk single-crystal facets were identified. It is shown that the smooth facets in single crystals correspond to the (0001), Ga-terminated, lattice planes,… Show more

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Cited by 233 publications
(141 citation statements)
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“…At first a GaN nucleation layer was deposited on the (0001) sapphire substrate. Afterwards a GaN layer of about 1.5 m thickness was grown at an substrate temperature of 1040 C with trimethylgallium (TMGa) and ammonia precursors at a V/III ratio of 2,000 [9].GaN grows in MOVPE on sapphire in the (0001) direction with Ga terminated basal plans (Ga-face) [10].On the base of these substrates we prepare different surface stoichiometries by a variation of the precursor amount in nitrogen carrier gas without deterioration of the surface. In case of an increased Ga supply this can be achieved through short TMGa pulses to avoid Ga droplet formation.…”
Section: Methodsmentioning
confidence: 99%
“…At first a GaN nucleation layer was deposited on the (0001) sapphire substrate. Afterwards a GaN layer of about 1.5 m thickness was grown at an substrate temperature of 1040 C with trimethylgallium (TMGa) and ammonia precursors at a V/III ratio of 2,000 [9].GaN grows in MOVPE on sapphire in the (0001) direction with Ga terminated basal plans (Ga-face) [10].On the base of these substrates we prepare different surface stoichiometries by a variation of the precursor amount in nitrogen carrier gas without deterioration of the surface. In case of an increased Ga supply this can be achieved through short TMGa pulses to avoid Ga droplet formation.…”
Section: Methodsmentioning
confidence: 99%
“…39 A similar growth model of nanorod morphology depending on the MBE system geometry was also proposed by Galopin et al 40 In the last 2 years, the polarity of GaN nanorods became an attractive topic. [41][42][43][44][45] To determine the polarity of the GaN nanorods, many methods were employed, for example, convergent beam electron diffraction (CBED), 46,47 electron energy loss spectra (EELS), 48 probe Cs corrected transmission electron microscopy measurement, 49 Kelvin probe force microscopy (KPFM), 50 piezoresponse force microscopy (PFM), 51 coaxial impact-collision ion scattering spectroscopy (CAICISS) analysis, 52 circular photogalvanic effect (CPGE), 53 and wet chemical etching. 54 Most of them are also suitable for polarity measurement of the nanorod structure.…”
Section: B Catalyst-free Gan Nanorod Growthmentioning
confidence: 99%
“…It is almost a surprise, given the differences between the two surfaces, that GaN of reasonable quality could even be grown with both polarities. Recently, the polarity identification problem has attracted the attention of electron microscopists [2] [3] [4], but there have been conflicting results.…”
Section: Introductionmentioning
confidence: 99%