Detection of wavelength shift of near-infrared laser using mechanical microresonator-based sensor with Si-covered gold nanorods as optical absorber

Sugano, Koji; Tanaka, Yuki; Uesugi, Akio; Maeda, Etsuo; Kometani, Reo; Isono, Yoshitada

doi:10.1016/j.sna.2020.112337

Cited by 8 publications

(4 citation statements)

References 40 publications

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“…The mechanism is simply that an object will absorb photons of light and convert the absorbed photon energy into thermal energy. According to existing research, the heat balance equation under the energy condition of beam radiation can be expressed by formula (2) [33,34]:…”

Section: Theoretical Model Establishment and Analysismentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

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Micro-electro mechanical system resonant gyroscope plays a more and more important role in inertial navigation. As a core sensing component of micro resonant gyroscope, fused silica micro hemispherical resonator (FS-MHR) is widely concerned because of its great performance potential. The resonance frequency is one of the important characteristic parameters of micro resonators, and laser vibration measurement technology is often used for high-precision measurement of this parameter. During the measurement process, it is inevitably affected by the interference of some light sources. To explore how light affects the resonance characteristics of FS-MHR, this paper establishes a relevant theoretical model; and verifies and analyzes the influence of the photothermal effect on the resonance characteristics of FS-MHR through simulation and experiment. Revealed the trend of temperature and resonance frequency changes over time under the same lighting conditions for uncoated and metal-coated films. The measured data shows that the resonance frequency of FS-MHR coated with the metal film is more susceptible to the influence of the photothermal effect. After 60 s of illumination, the resonance frequency will increase by 6.13 Hz, and frequency splitting will also cause a deviation fluctuation of 2.35 Hz under continuous illumination. This will introduce certain errors in the measurement results, and corresponding measures need to be taken to avoid interference from the light source.

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Section: Theoretical Model Establishment and Analysismentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

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“…Sensitive measurement of laser intensity has the potential to be applied to further increase the resolution of applications using laser wavelength measurement. 11,12) Figure 1 shows the process of the proposed highly sensitive vibration measurement method. To measure vibration states from the overall vibration spectrum, we develop the method using deep learning.…”

Section: Introductionmentioning

confidence: 99%

Highly sensitive vibration measurement method of nanomechanical resonators using a convolutional neural network

Tsumune

Warisawa

Kometani

2022

Jpn. J. Appl. Phys.

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Nanomechanical resonator can detect various small physical quantities. It is necessary to increase the sensitivity of the nanomechanical resonator. In this study, deep learning-based method was developed for sensitive detection of vibration state of nanomechanical resonator. It enables to explore the highest sensitive vibration states without missing while conventional methods focus only on the resonant frequency. A proposed method was evaluated with the laser intensity. Sensitive measurement of laser intensity has the potential to be applied to laser wavelength measurement application. The proposed method could identify laser intensity at intervals of 0.03 mW at which the resonance frequency didn’t shift. Grad-CAM was used to clarify the features on the vibration spectra used in CNN. Frequency bands other than the resonance frequency band were used for laser intensity measurement. This result implies that there is a possibility that highly sensitive vibration behavior exists outside the resonance frequency.

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“…11 There are previous reports on optical measurement devices that utilize variation of resonance frequency due to thermal stress in transducers caused by light absorption. [12][13][14][15][16] The transducers are made of silicon nitride (SiN) or Si, and most typically, laser Doppler vibrometers are used to measure vibration amplitude and to detect resonance frequency changes. [12][13][14][15][16] There are also reports on integration of metal plasmonic structures to achieve high absorbance and wavelength dependence.…”

Section: Introductionmentioning

confidence: 99%

“…[12][13][14][15][16] The transducers are made of silicon nitride (SiN) or Si, and most typically, laser Doppler vibrometers are used to measure vibration amplitude and to detect resonance frequency changes. [12][13][14][15][16] There are also reports on integration of metal plasmonic structures to achieve high absorbance and wavelength dependence. 14,15 However, there is no information about Si-MEMS transducers based on a displacement detection principle suitable for portable devices, or on spectroscopic applications of such transducers.…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic measurement of water using an electrostatic transducer with near‐infrared absorber

Suzuki

Nakafuji

Uesugi

et al. 2021

Elect Comm in Japan

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The widespread of near-infrared spectroscopes in the consumer field is expected to create new demand, such as the detections of fruit and vegetable rot and the easy measurement of the amount of water in the skin. Conventional cooled photodiodes using compound semiconductor materials such as InGaAs have problems with cost reduction and miniaturization. Therefore, we proposed an electrostatic Si microresonator device for the realization of a near-infrared optical sensor. This device measures the resonance frequency shift caused by the thermal stress generated in the resonator due to light absorption depending on the light intensity. The purpose of this study is to apply the device to near-infrared spectroscopy of water as a photodetector. We proposed an evaluation method based on a theoretical equation and confirmed that the device could detect the nearinfrared absorption spectrum of water. The measurement results of the developed device matched well with that of the commercially available photodiode intensity sensor. In the future, it is expected that a compact near-infrared spectrometer with high sensitivity and low cost will be realized by arranging devices that integrate absorbers with different wavelength dependencies.

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Detection of wavelength shift of near-infrared laser using mechanical microresonator-based sensor with Si-covered gold nanorods as optical absorber

Cited by 8 publications

References 40 publications

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Highly sensitive vibration measurement method of nanomechanical resonators using a convolutional neural network

Spectroscopic measurement of water using an electrostatic transducer with near‐infrared absorber

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