Detection of surface acoustic waves by scanning force microscopy

Rohrbeck, W.; Chilla, E.

doi:10.1002/pssa.2211310111

Cited by 69 publications

(25 citation statements)

References 3 publications

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“…Ultrasonic vibration in the MHz fre quency range can also be detected by AFMs, either directly using a mixing tech nique [3] or indirectly using the mean deflection of the cantilever used to support the sensor. This deflection reflects the nonlinear force between the tip and sur face of the sample surface [4][5][6][7].…”

mentioning

confidence: 99%

Near-Field Acoustic Microscopy

Hirsekorn¹,

Rabe²,

Arnold³

1996

Europhys. News

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mentioning

confidence: 99%

Near-Field Acoustic Microscopy

Hirsekorn¹,

Rabe²,

Arnold³

1996

Europhys. News

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“…Nevertheless, if the diffracting features are at the interface or under but in proximity to the surface investigated by AFM, the tip can be used as a mechanical probe to collect the evanescent-but not yet extinguished-diffracted waves. In practice, the unique lateral resolution enabled by SPM techniques suggested to employ both AFM [18,19] and STM [20][21][22] for studying SAWs propagation and related phenomena (reflection, mode conversion, diffraction, scattering, interaction with elastic inhomogeneities at nanoscale) [23]. Use of SPM probes for detecting evanescent acoustic waves is the same idea that led to scanning near-field optic microscopy (SNOM) [17,[24][25][26], where AFM is used for collecting diffracted evanescent electromagnetic waves from nanometrical objects.…”

Section: Detecting the Near-field Acoustic Wavesmentioning

confidence: 98%

Acoustic Scanning Probe Microscopy: An Overview

Passeri

Marinello

2012

Acoustic Scanning Probe Microscopy

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In this chapter, which serves as an introduction to the entire book, an overview is given of techniques resulting from the synergy between ultrasonic methods and scanning probe microscopy (SPM). Although other acoustic SPMs have been developed, those reviewed in this book are either the earliest proposed techniques, which are most widespread, extensively used, and continuously improved, or have been recently developed, but have been proved to be extremely promising. The techniques are briefly introduced, emphasizing what they have in common, their differences, their capabilities, and limitations.

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“…When a SAW passes the tip the cantilever with typical resonance frequencies in the subMHz range cannot follow the fast surface oscillations. Nevertheless, an amplitude-dependent signal is generated due to the nonlinear force-to-distance dependence [5]. This shift of the mean lever position is caused by the time average of the surface oscillation and nonlinear interaction.…”

Section: The Safm Principlementioning

confidence: 99%

Force microscopy for the investigation of high-frequency surface acoustic wave devices

Hesjedal

Fröhlich

Chilla

1998

Applied Physics A: Materials Science & Processing

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Surface acoustic wave (SAW) devices are of great importance in mobile communication and signal processing applications. For their optimization second-order effects, like diffraction or mass loading, have to be studied. However, meeting today's demands of GHz operation new ways of wave field mapping have to be developed, since common methods, like laser optical or electron microscope probing, are resolution limited to the micron range. Scanning acoustic force microscopy (SAFM) allows the detection of the high-frequency surface oscillations having sub-Å amplitudes with the force microscope's typical lateral resolution. The key for measuring the high mechanical frequencies is the nonlinear force curve. Another approach is the force microscope mapping of rearranged fine particles, revealing the nodes and antinodes of the standing wave field. We present measurements in the near field of, and within, acoustic devices fabricated on piezoelectric substrates, such as LiNbO 3 and quartz, and being operated at frequencies around 600 MHz. By employing SAFM, the local influence of the electrodes on the wave field, leading to undesired performance losses, was investigated.The investigation of surface acoustic waves (SAWs) goes back to Lord Rayleigh [1]. He discovered the existence of waves on the plane free surface of an infinite, homogeneous, isotropic and elastic solid based on the theory of elasticity. The modes show a wavelike behavior in directions parallel to the surface and decay perpendicular to it. In the field of microacoustics SAWs are of interest in the frequency range from some MHz to some GHz, thus being a part of the field of ultrasonics. Due to their localization in the vicinity of the surface, SAWs provide a suitable tool for thin film nondestructive evaluation purposes. Additionally, SAWs are widely used in the field of signal processing. This comes from the fact that the relatively slow sound velocities of some thousand m/s compared with those of electromagnetic waves lead to small wavelengths making signal processing devices small, and therefore, rugged and reliable. Moreover, the surface localization allows the design of a whole variety of devices since the waves can be easily manipulated, and, on the other hand, the integration in lithographic production processes is possible. The excitation of SAWs can be performed on piezoelectrics by a pair of conducting electrodes that produce spatially nonuniform and oscillating electric fields acting as a source of varying local stresses. In this way acoustic waves can be launched. A transducer like this is reciprocal, i.e. it can excite and receive acoustic waves. In order to increase the efficiency, many sources have to be arranged such that the waves they produce interfere coherently. This increase of efficiency is at the cost of larger bandwidth. However, first the invention of the interdigital transducer (IDT) [2], where the electric field changes its sign from electrode to electrode, gave the push towards industrial application.With the demand of GHz SAW devic...

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Detection of surface acoustic waves by scanning force microscopy

Cited by 69 publications

References 3 publications

Near-Field Acoustic Microscopy

Near-Field Acoustic Microscopy

Acoustic Scanning Probe Microscopy: An Overview

Force microscopy for the investigation of high-frequency surface acoustic wave devices

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