Design studies on piezoresistive humidity sensors

Buchhold, R.; Nakladal, A.; Gerlach, Gerald; Neumann, Peter Horst

doi:10.1016/s0925-4005(98)00297-4

Cited by 47 publications

(19 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to vapor-induced swelling of the polymer sensitive film consists of a very complex mixture of adsorption, absorption and diffusion processes [8], thus far, analytical models are not analyze the interactions between polymer film adsorbed vapor and NEMS diaphragm, and those models only describing the performance of piezoresistive sensor have been developed only for diaphragm configurations with the piezoresistors [9]. In our research, we found that vapor-induced swelling stress of polymer film is linear in a wide range of the vapor concentration and the value of the swelling stress is determined by the linear swelling coefficient of polymer in vapor > 4 and concentration of vapor.…”

Section: : Simulation Methods and Modelingmentioning

confidence: 99%

A feasible simulation method for vapor sensor based on polymer-coated NEMS diaphragm

Guo

Chen

2015

Measurement

View full text Add to dashboard Cite

Section: : Simulation Methods and Modelingmentioning

confidence: 99%

A feasible simulation method for vapor sensor based on polymer-coated NEMS diaphragm

Guo

Chen

2015

Measurement

View full text Add to dashboard Cite

“…A higher sensitivity could be reached by using a thicker polyimide layer. Unfortunately, the response time also increases with increasing thickness because more time is needed for the diffusion of the water molecules into the polymer layer (Buchhold et al, 1998d). Patches with a size of 300 × 300 µm 2 were patterned in the center of the bending plate using a photolithographic process (see Fig.…”

Section: Polymer Layermentioning

confidence: 99%

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

Waber

Sax

Pahl

et al. 2014

J. Sens. Sens. Syst.

View full text Add to dashboard Cite

Abstract.A highly miniaturized piezoresistive humidity sensor has been developed. The starting point of the development was a 1 × 1 mm 2 piezoresistive pressure sensor chip. As sensing material, a polyimide was used that swells with increasing adsorption of water molecules. To convert the swelling into an electrical signal, a thin layer of the polyimide was deposited onto the bending plate of the pressure sensor. The humidity sensor was characterized in a climate chamber. The measurements show a sensitivity of 0.25 mV per percent relative humidity (%RH) and a non-linearity of 3.1 % full scale (FS) in the range of 30-80 % RH. A high cross-sensitivity to temperature of around 0.5 mV • C −1 was measured, so temperature compensation is necessary. For stress-free packaging of the sensor chip, a novel packaging technology was developed.

show abstract

“…For the piezoresistors subjected to parallel and perpendicular stress components are and , respectively. The piezoresistor change is [8] ( 10) where and are the piezoresistive coefficients parallel and perpendicular to the piezoresistors length, respectively.…”

Section: Principle Of Operationmentioning

confidence: 99%

“…Their performance strongly depends on the geometry of the diaphragm, i.e., its area and thickness, and the position of the piezoresistors [8]. Because of the excellent characteristics of silicon cups, they have been applied as humidity sensors [10] and pH sensors [11]. In this paper, the proposed sensor is composed of a silicon cup sensitivity diaphragm (SD) embedded with a piezoresistive Wheatstone bridge.…”

Section: Introductionmentioning

confidence: 99%

Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets

Chen

Qing-fu

2011

IEEE Sensors J.

View full text Add to dashboard Cite

In order to solve the problems of cantilever-based magnetic sensors and develop the simple and low-cost magnetic field sensors, novel sensors based on a cylindrical ferromagnet attached to a silicon diaphragm and piezoresistive membrane are proposed. The interaction between the magnetic field and the ferromagnet generates a deflection of the diaphragm, which changes the piezoresistance and unbalances a Wheatstone bridge. The sensitivity of the sensors is proportional to the permeability, supply voltage, and aspect ratio of the ferromagnet. These low-cost, low-power sensors are easily integrated with electronic circuits.

show abstract

Design studies on piezoresistive humidity sensors

Cited by 47 publications

References 4 publications

A feasible simulation method for vapor sensor based on polymer-coated NEMS diaphragm

A feasible simulation method for vapor sensor based on polymer-coated NEMS diaphragm

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets

Contact Info

Product

Resources

About