A feasible simulation method for vapor sensor based on polymer-coated NEMS diaphragm

Guo, Hailin; Chen, Xiangdong; Wu, Zuquan

doi:10.1016/j.measurement.2015.02.055

Cited by 5 publications

(1 citation statement)

References 10 publications

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“…To investigate the relationship between the parameters of the sensing layer and the output of the vapor sensor, a model of the senor is built. In this model, the strain distribution of the FBAR area under vapor loads is obtained using finite element analysis (FEA) relying on the equivalence principle of polymer swelling which has been verified as effective in our previous work [ 11 ]. Then, the response frequency changes of the FBAR under vapor loads are obtained based on both the first-principle methods to deduce the elastic coefficient variation of the aluminum nitride film in the FBAR under the bending stresses and the Mason equivalent circuit model of the sensor using ADS software.…”

Section: Sensing Film Optimizationmentioning

confidence: 99%

Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements

Guo

Guo²,

Gao

et al. 2017

Sensors

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Film bulk acoustic resonators (FBARs) are widely applied in mass bio-sensing and pressure sensors, owing to their extreme sensitivity and integration ability, and ability to miniaturize circuits. A volatile organic compound (VOC) sensor with a polymer-coated diaphragm, using FBARs as a strain sensing element is proposed and optimized. This vapor sensor is based on organic vapor-induced changes of mechanical deformation of the micro-diaphragm. The four FBARs are located at the edge of the bi-layer diaphragm comprising silicon nitride and silicon oxide for strain extraction. In this work, the strain distribution of the FBAR area under vapor loads is obtained using the finite element analysis (FEA) and the response frequency changes of the FBARs under vapor loads are obtained based on both the first-principle methods to deduce the elastic coefficient variation of aluminum nitride film in FBARs under the bending stresses and the Mason equivalent circuit model of the sensor using ADS software. Finally, optimizations are performed on both the bilayered diaphragm structure and sensing film. The diaphragm with a 0.7 μm silicon nitride layer and a 0.5 μm silicon oxide layer are considered to be the optimized design. The optimal coverage area of the sensing film for the diaphragm is around 0.8.

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Section: Sensing Film Optimizationmentioning

confidence: 99%