Design, simulation, and testing of IDT-based MEMS gyroscope

Suh, William D; Jose, K. A.; Xavier, P.; Varadan, Vijay K.; Varadan, Vasundara V.

doi:10.1117/12.436589

Cited by 4 publications

(2 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The experimental results obtained in the testing of this design concept by Varadan et al are published in [5]. The authors used YX cut LiNbO 3 and a resonator with a frequency of about 74 MHz.…”

Section: Ssg On Standing Sawmentioning

confidence: 96%

“…A great number of works was published near the year 2000. Most of them were authored by Varadan et al [2][3][4][5][6][7], who tried to implement the concept proposed by Kuro sawa in 1997 [8][9]. However, from paper to paper, the predicted sensitivity of the SSG was decreasing until the year 2001, when Woods et al showed that this concept was infeasible for most applications [10].…”

Section: Introductionmentioning

confidence: 91%

See 1 more Smart Citation

State of the art and prospects for the development of SAW-based solid-state gyros

et al. 2011

View full text Add to dashboard Cite

Modern MEMS gyros are widely used nowadays, however, the field of high dynamic moving objects is still hardly accessible for them because of rigid requirements for the sensors to be shock resistant. Solid state gyros (SSG), namely, those that are based on surface acoustic waves (SAW), are likely to become the solution to this problem. This paper provides a short introduction to theory of SAW based SSGs and a brief overview of the existing design concepts, which are described, analyzed, and compared with each other. The main advantages, problems, and prospects for further development of SAW based SSGs are discussed.

show abstract

Section: Ssg On Standing Sawmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 91%

State of the art and prospects for the development of SAW-based solid-state gyros

et al. 2011

View full text Add to dashboard Cite

show abstract

Micro rate gyros for highly dynamic objects

2014

View full text Add to dashboard Cite

A novel progressive wave gyroscope based on acousto-optic effects

Shen

Chang

2022

Microsyst Nanoeng

View full text Add to dashboard Cite

We propose and numerically investigate a brand-new, high-sensitivity progressive wave gyroscope based on acousto-optic effects for the measurement of rotational angular velocity. Unlike the traditional surface acoustic wave (SAW) gyroscope, which uses shifts in the SAW frequency to characterize the rotational angular velocity, this study uses acousto-optic effects to detect changes in refractive index caused by mechanical strain, measuring the angular velocity by the output optical power intensity of the optical waveguide. The three-dimensional finite element analysis method is utilized to build an SAW excitation model and optical detection model. We show that the sensitivity of the SAW gyroscope is highly dependent upon geometric parameters of the structure and that the mechanical strain induced by the progressive wave of the SAW can be effectively measured by the optical power intensity under the action of external angular velocity. The superiority of the proposed structure is substantiated by its achievement of a theoretical sensitivity of 1.8647 (mW/m2)/(rad/s) and high impact resistance of 220,000 g. By means of normalization, the sensitivity of the proposed structure can be enhanced by four orders of magnitude compared to the traditional SAW gyroscope. The novel structure combines the advantages of both conventional microscale vibrating gyroscopes and optical gyroscopes, providing a powerful solution for performance enhancement of SAW gyroscopes and, thereby, enabling application in the field of inertial devices.

show abstract

Design, simulation, and testing of IDT-based MEMS gyroscope

Cited by 4 publications

References 0 publications

State of the art and prospects for the development of SAW-based solid-state gyros

State of the art and prospects for the development of SAW-based solid-state gyros

Micro rate gyros for highly dynamic objects

A novel progressive wave gyroscope based on acousto-optic effects

Contact Info

Product

Resources

About