Design optimization of RF-MEMS switch considering thermally induced residual stress and process uncertainties

Saleem, Muhammad Mubasher; Somà, Aurelio

doi:10.1016/j.microrel.2015.07.026

Cited by 10 publications

(2 citation statements)

References 47 publications

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“…The moving parts of the microstructure are built through a two-step gold electroplating process over a photoresist of 3 µm thickness, resulting in thicker and stiffer suspended plates compared to the central specimen. A summary of RFS microfabrication process steps is widely described in [28,50,51]. It is important to point out that the fabrication process is designed to limit the onset of residual stress, as explained in detail in previous authors' works [45,46,52].…”

Section: Test Microstructure Designmentioning

confidence: 99%

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

Pistorio

Somà

2023

J. Micromech. Microeng.

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The characterization of fatigue fracture mechanics in gold-MEMS notched specimens is presented in this work. A test microstructure with a central notched specimen is specifically designed and built to perform on-chip fatigue test. The central specimen undergoes cyclic loading due to the application of alternating voltage. The variation in the microstructure deflection is measured using an optical profilometer and is attributed to the crack growth in the gold material, causing the variation in the specimen stiffness. The occurrence of pull-in condition is used as a fracture detector, then the fracture of the specimen can be recognized without performing scanning electron microscope inspections during the fatigue test. Crack propagation in the test specimen is simulated through a coupled-field electromechanical fracture finite element model and the computed crack path is compared to the results obtained from scanning electron microscope analyses. Finally, Paris' law is applied and the number of cycles to failure is computed by exploiting the results of the fracture model and experimental measurements. Both experimental and numerical results demonstrate that the notch acts as a stress and strain raiser, fostering crack nucleation from the notch root, and that the linear elastic fracture mechanics theory is still valid to describe crack propagation in micro-size samples.

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Section: Test Microstructure Designmentioning

confidence: 99%

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

Pistorio

Somà

2023

J. Micromech. Microeng.

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“…A multi-response optimization using Design of Experiments (DOE) allows for investigating the design space of a MEMS device at different sample points using FEM models with less time, effort, and computational costs and facilitates the analysis of the effect of different parameters on output responses in detail. Previously, authors have discussed the application of the DOE technique for single-response optimization of a RF-MEMS switch to achieve a reliable and optimized design considering the microfabrication process uncertainties and residual stresses [ 32 ]. In this paper, a DOE-technique-based multi-response optimization for the scanning electrothermal micromirror design, to be integrated in the sample arm of an OCT system, is presented, considering mirror plate optical deflection angle, input power, and temperature rise from the ambient in the mirror plate.…”

Section: Introductionmentioning

confidence: 99%

Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology

et al. 2017

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The design of a micromirror for biomedical applications requires multiple output responses to be optimized, given a set of performance parameters and constraints. This paper presents the parametric design optimization of an electrothermally actuated micromirror for the deflection angle, input power, and micromirror temperature rise from the ambient for Optical Coherence Tomography (OCT) system. Initially, a screening design matrix based on the Design of Experiments (DOE) technique is developed and the corresponding output responses are obtained using coupled structural-thermal-electric Finite Element Modeling (FEM). The interaction between the significant design factors is analyzed by developing Response Surface Models (RSM) for the output responses. The output responses are optimized by combining the individual responses into a composite function using desirability function approach. A downhill simplex method, based on the heuristic search algorithm, is implemented on the RSM models to find the optimal levels of the design factors. The predicted values of output responses obtained using multi-response optimization are verified by the FEM simulations.

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Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications

et al. 2017

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Design optimization of RF-MEMS switch considering thermally induced residual stress and process uncertainties

Cited by 10 publications

References 47 publications

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology

Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications

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