Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications

Saleem, Muhammad Mubasher; Danish, Adnan Murtaza; Iqbal, Javed; Bazaz, Shafaat A.

doi:10.1007/s00542-017-3449-y

Cited by 11 publications

(2 citation statements)

References 48 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Moreover, numerous designs of linear electromagnetic energy harvesters adopted for microelectronic and microelectromechanical systems (MEMS) shows that this type of energy harvesters is suitable for micro-scale electronic systems and devices (Seree and et al 2006;Wang and et al 2009;Jiang and et al 2011;Han and et al 2014b;Saleem and et al 2017). However, this type of energy harvesters have limits in scaling due to usage of coils (Harb, 2011).…”

Section: Energy Harvesting Of Mechanical Vibrations Using Electromagnmentioning

confidence: 99%

Research of piezoelectric energy harvesting systems based on cantilevers with irregular cross-sections

Čeponis¹

2018

View full text Add to dashboard Cite

Disertacija rengta 2014-2018 metais Vilniaus Gedimino technikos universitete. Vadovas prof. dr. Dalius MAŽEIKA (Vilniaus Gedimino technikos universitetas, mechanikos inžinerija-09T). Vilniaus Gedimino technikos universiteto Mechanikos inžinerijos mokslo krypties disertacijos gynimo taryba: Pirmininkas prof. dr. Vytautas TURLA (Vilniaus Gedimino technikos universitetas, mechanikos inžinerija-09T). Nariai: prof. dr. Mindaugas JUREVIČIUS (Vilniaus Gedimino technikos universitetas, mechanikos inžinerija-09T), doc. dr. Artūras KILIKEVIČIUS (Vilniaus Gedimino technikos universitetas, mechanikos inžinerija-09T), prof. habil. dr. Vytautas OSTAŠEVIČIUS (Kauno technologijos universitetas, mechanikos inžinerija-09T), dr. Jens TWIEFEL (Hanoverio Leibnico universitetas, Vokietija, mechanikos inžinerija-09T). Disertacija bus ginama viešame Mechanikos inžinerijos mokslo krypties disertacijos gynimo tarybos posėdyje 2018 m. lapkričio 15 d. 10 val. Vilniaus Gedimino technikos universiteto senato posėdžių salėje.

show abstract

Section: Energy Harvesting Of Mechanical Vibrations Using Electromagnmentioning

confidence: 99%

Research of piezoelectric energy harvesting systems based on cantilevers with irregular cross-sections

Čeponis¹

2018

View full text Add to dashboard Cite

show abstract

“…The harvester can generate 0.82 µW power at 350 Hz under vibration acceleration of 4.5 g. Tao et al proposed a MEMS EM energy harvester with two degree-of-freedom (2-DoF) configuration, which can produce a peak normalized power density (NPD) of 0.23 µW cm −3 g −2 at resonance frequency of 391 Hz [14]. Saleem et al used commercially available microfabrication processes to form a 2-DoF EM MEMS harvester, where the NPD is 0.794 µW cm −3 g −2 and the device volume is 0.0058 cm 3 [15].…”

Section: Introductionmentioning

confidence: 99%

Silicon-chip based electromagnetic vibration energy harvesters fabricated using wafer-level micro-casting technique

Han¹,

Wang²,

Wang³

et al. 2021

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper reports a silicon-chip based electromagnetic (EM) vibration energy harvester that is fabricated with a wafer-level micro-casting technique to form on-chip integrated 3D metal solenoids and magnet sliding channels. Many solenoids of 150-turn coil are simultaneously formed by filling molten ZnAl x alloy into the pre-micromachined solenoid moulds in one wafer within 7 min. After saw dicing to obtain the solenoid chips, a sliding permanent magnet for responding to environmental vibration is inserted into the pre-etched silicon channel inside the solenoid. Excited by external vibration, the magnet can slide in the channel to generate electricity. The size of the micro electro mechanical systems (MEMS) harvester chip is only 10.5 × 2.5 × 1.7 mm3. The experimental results show that the energy harvester can efficiently collect vibration energy in the environment. Under excited acceleration-amplitude of 49 m s−2 (i.e. 5 g) at the frequency of 24 Hz, the normalized power density (NPD) generated from the harvester reaches 12.38 μW cm−3 g−2. By comparing with reported non-MEMS wire-wound EM harvesters and on-chip piezoelectric/electrostatic ones, this silicon-chip based EM harvester exhibits much superior NPD.

show abstract

Widening frequency bandwidth with parametric coupling in a wings-inspired low frequency MEMS energy harvester

Song

Cao

Shan

et al. 2022

Energy Conversion and Management

View full text Add to dashboard Cite

Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications

Cited by 11 publications

References 48 publications

Research of piezoelectric energy harvesting systems based on cantilevers with irregular cross-sections

Research of piezoelectric energy harvesting systems based on cantilevers with irregular cross-sections

Silicon-chip based electromagnetic vibration energy harvesters fabricated using wafer-level micro-casting technique

Widening frequency bandwidth with parametric coupling in a wings-inspired low frequency MEMS energy harvester

Contact Info

Product

Resources

About