Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool

Abstract

This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 μm, and ±2.3 μm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 μm, 0.3 μm, and 3 μm, respectively.

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

“…Ni et al proposed a method based on the combination of laser interferometry and laser collimation for simultaneously measuring multiple GMEs [25,26]. Similar methods were introduced by Liu et al [27,28]. Wang et al presented a method based on laser collimation for a miniaturized machine tool [29].…”

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

“…Relevant commercial interferometers produced by Renishaw, Keysight and JENAer are mostly used for single parameter measurement. With the increasing requirements for measurement efficiency, multiparameter simultaneous measurement systems based on the principle of laser collimation [ 7 , 8 , 9 , 10 ] or the combination of collimation and interference [ 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 ] continue to emerge, and have become the current research trend. Although, multiparameter simultaneous measurement systems have improved efficiency compared to single-parameter measurement systems, in actual measurement, it is often necessary to adjust the installation positions of the measurement head and the target mirror according to the machine tool types.…”

A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers

“…In order to enhance the measurement efficiency, simultaneous measurement of 6DOF geometric motion errors of both linear and rotary axes is an inevitable trend. Various methods for simultaneously measuring 6DOF geometric motion errors of the linear axis have been proposed by researchers, mainly including the collimation [8] and interferometry methods [9,10], as well as combinations of the two [11,12,13,14]. For example, Chen et al proposed a simple method for simultaneously measuring 6DOF geometric motion errors of a linear axis that can only move 6 mm [8].…”