A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers

Zheng, Fajia; Feng, Qibo; Zhang, Bin; Li, Jiakun

doi:10.3390/s19081764

Cited by 42 publications

(14 citation statements)

References 26 publications

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“…The measurement system for simultaneously measuring the 6DOF motion errors of a linear axis is based on the principles of laser interference and laser collimation. Figure 2 shows the configuration of the self-made measurement system [ 22 , 23 ]. This consists of a laser–fiber coupling unit, a measurement head, and a target mirror.…”

Section: A Simultaneous Measurement System and The Principle Of A mentioning

confidence: 99%

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Jia

Zhang

Feng

et al. 2020

Sensors

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Based on the prior work on the six degrees of freedom (6DOF) motion errors measurement system for linear axes, and for the different types of machine tools and different installation methods, this study used a ray tracing idea to establish the measurement models for two different measurement modes: (1) the measurement head is fixed and the target mirror moves and (2) the target mirror is fixed and the measurement head moves. Several experiments were performed on the same linear guide using two different measurement modes. The comparative experiments show that the two measurement modes and their corresponding measurement models are correct and effective. In the actual measurement process, it is therefore possible to select the corresponding measurement model according to the measurement mode. Furthermore, the correct motion error evaluation results can be obtained.

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Section: A Simultaneous Measurement System and The Principle Of A mentioning

confidence: 99%

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Jia

Zhang

Feng

et al. 2020

Sensors

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“…3,10 To address these shortcomings, numerous systems for simultaneously measuring the 6-DOF geometric errors of the linear stage of multiaxis CNC machine tools have been developed in recent years. [1][2][3][4][5][6][7][8][9][11][12][13][14][15][16][17] These measurement systems can be broadly classified as systems using (1) noninterferometric optical sensing technologies and (2) interferometric technologies. Noninterferometric optical sensing technologies have been demonstrated to have various advantages, including small size, low cost, and high accuracy; moreover, they enable noncontact measurement.…”

Section: Introductionmentioning

confidence: 99%

Development of low-cost heterodyne interferometer with virtual electronic phasemeter

Jan

Liu

Lin

2022

Measurement and Control

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Commercial laser interferometers are conventionally used to measure the positioning error of a long linear stage in multiaxis computer numerical control machine tools. However, commercial laser interferometers are costly and difficult to use. Therefore, a low-cost photodetector-based heterodyne interferometer combined with an electronic phasemeter module was proposed for precise measurement of the positioning error of a long linear stage. The proposed heterodyne interferometer was combined with a virtual electronic phasemeter that employs a self-developed signal-processing technique. Our core algorithm and proposed photoelectric-signal-processing technique were developed using the LabVIEW human–machine interface. Moreover, to verify the performance of the proposed heterodyne interferometer, a laboratory-built prototype was constructed and used to measure the positioning error of a long linear stage. The experimental results indicated that the positioning accuracy of the proposed interferometer was ±4.5 μm for a linear stage with a displacement of 250 mm; the results obtained were comparable to those obtained with a commercially available laser interferometer. The proposed heterodyne interferometer can thus be used in other applications related to precision engineering.

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“…In the optics-based autofocusing method, the triangle geometric and dual-confocal configurations are widely used in the system. The triangle geometric technologies are well-known optical methods which are applied in many inspection instruments [38][39][40]. Our research group has published many methods to improve the focusing accuracy and response of the optics-based autofocusing systems with triangle geometric technologies [27][28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Implementation and Optimization of a Dual-confocal Autofocusing System

Jan

Liu

Yang

2020

Sensors

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This paper describes the implementation and optimization of a dual-confocal autofocusing system that can easily describe a real-time position by measuring the response signal (i.e., intensity) of the front and the rear focal points of the system. This is a new and systematic design strategy that would make it possible to use this system for other applications while retrieving their characteristic curves experimentally; there is even a good chance of this technique becoming the gold standard for optimizing these dual-confocal configurations. We adopt two indexes to predict our system performance and discover that the rear focal position and its physical design are major factors. A laboratory-built prototype was constructed and demonstrated to ensure that its optimization was valid. The experimental results showed that a total optical difference from 150 to 400 mm significantly affected the effective volume of our designed autofocusing system. The results also showed that the sensitivity of the dual-confocal autofocusing system is affected more by the position of the rear focal point than the position of the front focal point. The final optimizing setup indicated that the rear focal length and the front focal length should be set at 200 and 100 mm, respectively. In addition, the characteristic curve between the focus error signal and its position could successfully define the exact position by a polynomial equation of the sixth order, meaning that the system can be straightforwardly applied to an accurate micro-optical auto-focusing system.

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A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers

Cited by 42 publications

References 26 publications

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Development of low-cost heterodyne interferometer with virtual electronic phasemeter

Implementation and Optimization of a Dual-confocal Autofocusing System

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